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Title: Self-heated hollow cathode discharge system for charged particle sources and plasma generators

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3258033· OSTI ID:22053875
; ; ;  [1];  [2]
  1. Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 534055 (Russian Federation)
  2. Institute of Physics, Ukrainian National Academy of Sciences, Kiev 38028 (Ukraine)

This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.

OSTI ID:
22053875
Journal Information:
Review of Scientific Instruments, Vol. 81, Issue 2; Conference: ICIS 2009: 13. international conference on ion sources, Gatlinburg, TN (United States), 20-25 Sep 2009; Other Information: (c) 2010 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English