Self-heated hollow cathode discharge system for charged particle sources and plasma generators
Journal Article
·
· Review of Scientific Instruments
- Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 534055 (Russian Federation)
- Institute of Physics, Ukrainian National Academy of Sciences, Kiev 38028 (Ukraine)
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.
- OSTI ID:
- 22053875
- Journal Information:
- Review of Scientific Instruments, Vol. 81, Issue 2; Conference: ICIS 2009: 13. international conference on ion sources, Gatlinburg, TN (United States), 20-25 Sep 2009; Other Information: (c) 2010 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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