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Title: Effects of deposition and annealing temperatures on the electrical and optical properties of Ag{sub 2}O and Cu{sub 2}O-Ag{sub 2}O thin films

Abstract

Ag{sub 2}O and Ag{sub 2}O-Cu{sub 2}O films were deposited on glass substrates by magnetron sputtering of Ag and Cu targets at various substrate temperatures. After deposition, some of these films were annealed using a rapid thermal annealing system, with the variation of temperature. An UV-VIS-NIR photometer and a Hall measurement system were used to characterize the optical and electrical properties of these films. On annealing, Ag{sub 2}O (hexagonal) phase would slowly change to Ag+Ag{sub 2}O (cubic) phases when the annealing temperature is greater than 200 deg. C When the annealing temperature was higher than 450 deg. C, the Ag{sub 2}O phase would transform into a metallic Ag phase completely. Accordingly, the band gap of these films will change, along with the optical and electrical properties. In the study of Ag{sub 2}O-Cu{sub 2}O films, it is found that these two-phase composite films could exist obviously when deposited at room temperature. The photoinduced current of these composite films could be increased significantly, compared with that of a single Cu{sub 2}O phase. This is most likely due to that a large band gap semiconductor (Cu{sub 2}O) is coupled with a small band gap semiconductor (Ag{sub 2}O).

Authors:
; ; ;  [1];  [2];  [2]
  1. Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan (China)
  2. (China)
Publication Date:
OSTI Identifier:
22053736
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 28; Journal Issue: 4; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; COPPER OXIDES; DEPOSITION; ELECTRICAL PROPERTIES; GLASS; MAGNETRONS; OPTICAL PROPERTIES; PHOTOMETERS; SEMICONDUCTOR MATERIALS; SILVER OXIDES; SPUTTERING; TEMPERATURE RANGE 0273-0400 K; THIN FILMS

Citation Formats

Tseng, C. C., Hsieh, J. H., Lin, C. H., Wu, W., Department of Materials Engineering, Mingchi University of Technology, 84 Gungjuan Rd., Taishan, Taipei 24301, Taiwan, and Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan. Effects of deposition and annealing temperatures on the electrical and optical properties of Ag{sub 2}O and Cu{sub 2}O-Ag{sub 2}O thin films. United States: N. p., 2010. Web. doi:10.1116/1.3425638.
Tseng, C. C., Hsieh, J. H., Lin, C. H., Wu, W., Department of Materials Engineering, Mingchi University of Technology, 84 Gungjuan Rd., Taishan, Taipei 24301, Taiwan, & Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan. Effects of deposition and annealing temperatures on the electrical and optical properties of Ag{sub 2}O and Cu{sub 2}O-Ag{sub 2}O thin films. United States. doi:10.1116/1.3425638.
Tseng, C. C., Hsieh, J. H., Lin, C. H., Wu, W., Department of Materials Engineering, Mingchi University of Technology, 84 Gungjuan Rd., Taishan, Taipei 24301, Taiwan, and Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan. Thu . "Effects of deposition and annealing temperatures on the electrical and optical properties of Ag{sub 2}O and Cu{sub 2}O-Ag{sub 2}O thin films". United States. doi:10.1116/1.3425638.
@article{osti_22053736,
title = {Effects of deposition and annealing temperatures on the electrical and optical properties of Ag{sub 2}O and Cu{sub 2}O-Ag{sub 2}O thin films},
author = {Tseng, C. C. and Hsieh, J. H. and Lin, C. H. and Wu, W. and Department of Materials Engineering, Mingchi University of Technology, 84 Gungjuan Rd., Taishan, Taipei 24301, Taiwan and Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan},
abstractNote = {Ag{sub 2}O and Ag{sub 2}O-Cu{sub 2}O films were deposited on glass substrates by magnetron sputtering of Ag and Cu targets at various substrate temperatures. After deposition, some of these films were annealed using a rapid thermal annealing system, with the variation of temperature. An UV-VIS-NIR photometer and a Hall measurement system were used to characterize the optical and electrical properties of these films. On annealing, Ag{sub 2}O (hexagonal) phase would slowly change to Ag+Ag{sub 2}O (cubic) phases when the annealing temperature is greater than 200 deg. C When the annealing temperature was higher than 450 deg. C, the Ag{sub 2}O phase would transform into a metallic Ag phase completely. Accordingly, the band gap of these films will change, along with the optical and electrical properties. In the study of Ag{sub 2}O-Cu{sub 2}O films, it is found that these two-phase composite films could exist obviously when deposited at room temperature. The photoinduced current of these composite films could be increased significantly, compared with that of a single Cu{sub 2}O phase. This is most likely due to that a large band gap semiconductor (Cu{sub 2}O) is coupled with a small band gap semiconductor (Ag{sub 2}O).},
doi = {10.1116/1.3425638},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 4,
volume = 28,
place = {United States},
year = {2010},
month = {7}
}