Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer

Journal Article · Fri Jan 15 00:00:00 EST 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3256200· OSTI ID:22053604

Figueiras, F; Rauwel, E; Amaral, V S; Vyshatko, N; Kholkin, A L; Soyer, C; Remiens, D; Shvartsman, V V; Borisov, P; Kleemann, W ^[1]; IENM-DOAE-MIMM-IEMN, 59655 Villeneuve d'Ascq ^[2]

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1. Department of Physics and CICECO, University of Aveiro, 3810-193 Aveiro (Portugal)
2. France

Film deposition of Ni{sub 2}MnGa phaselike alloy by radio frequency (rf) magnetron sputtering was performed onto bare Si(100) substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} (LNO/PZT) ferroelectric buffer layer near room temperature. The prepared samples were characterized using conventional x-ray diffraction (XRD), superconducting quantum interference device, and electron dispersive x-ray spectroscopy from scanning electron microscope observations. The optimized films deposited under high rf power and low argon pressure present good surface quality and highly textured phase crystallization. The positioning distance between the substrate and the target-holder axis has some limited effect on the film's composition due to the specific diffusion behavior of each element in the sputtering plasma. Extended four pole high resolution XRD analysis allowed one to discriminate the intended Ni-Mn-Ga tetragonal martensitic phase induced by the (100) LNO/PZT oriented buffer. This low temperature process appears to be very promising, allowing separate control of the functional layer's properties, while trying to achieve high electromagnetoelastic coupling.

• OSTI ID: 22053604
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 28, Issue 1; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
BUFFERS
CRYSTALLIZATION
DEPOSITION
FERROELECTRIC MATERIALS
GALLIUM ALLOYS
LANTHANUM COMPOUNDS
MANGANESE ALLOYS
MARTENSITIC STEELS
NICKEL ALLOYS
PLASMA
PZT
RADIOWAVE RADIATION
SCANNING ELECTRON MICROSCOPY
SILICON
SQUID DEVICES
SURFACES
THIN FILMS
X-RAY DIFFRACTION
X-RAY SPECTROSCOPY