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Title: Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer

Abstract

Film deposition of Ni{sub 2}MnGa phaselike alloy by radio frequency (rf) magnetron sputtering was performed onto bare Si(100) substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} (LNO/PZT) ferroelectric buffer layer near room temperature. The prepared samples were characterized using conventional x-ray diffraction (XRD), superconducting quantum interference device, and electron dispersive x-ray spectroscopy from scanning electron microscope observations. The optimized films deposited under high rf power and low argon pressure present good surface quality and highly textured phase crystallization. The positioning distance between the substrate and the target-holder axis has some limited effect on the film's composition due to the specific diffusion behavior of each element in the sputtering plasma. Extended four pole high resolution XRD analysis allowed one to discriminate the intended Ni-Mn-Ga tetragonal martensitic phase induced by the (100) LNO/PZT oriented buffer. This low temperature process appears to be very promising, allowing separate control of the functional layer's properties, while trying to achieve high electromagnetoelastic coupling.

Authors:
; ; ; ; ; ; ; ; ;  [1];  [2]
  1. Department of Physics and CICECO, University of Aveiro, 3810-193 Aveiro (Portugal)
  2. France
Publication Date:
OSTI Identifier:
22053604
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 28; Journal Issue: 1; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ARGON; BUFFERS; CRYSTALLIZATION; DEPOSITION; FERROELECTRIC MATERIALS; GALLIUM ALLOYS; LANTHANUM COMPOUNDS; MANGANESE ALLOYS; MARTENSITIC STEELS; NICKEL ALLOYS; PLASMA; PZT; RADIOWAVE RADIATION; SCANNING ELECTRON MICROSCOPY; SILICON; SQUID DEVICES; SURFACES; THIN FILMS; X-RAY DIFFRACTION; X-RAY SPECTROSCOPY

Citation Formats

Figueiras, F, Rauwel, E, Amaral, V S, Vyshatko, N, Kholkin, A L, Soyer, C, Remiens, D, Shvartsman, V V, Borisov, P, Kleemann, W, Department of Ceramics and Glass Engineering and CICECO, University of Aveiro, 3810-193 Aveiro, IENM-DOAE-MIMM-IEMN, 59655 Villeneuve d'Ascq, and Department of Physics, University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg. Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer. United States: N. p., 2010. Web. doi:10.1116/1.3256200.
Figueiras, F, Rauwel, E, Amaral, V S, Vyshatko, N, Kholkin, A L, Soyer, C, Remiens, D, Shvartsman, V V, Borisov, P, Kleemann, W, Department of Ceramics and Glass Engineering and CICECO, University of Aveiro, 3810-193 Aveiro, IENM-DOAE-MIMM-IEMN, 59655 Villeneuve d'Ascq, & Department of Physics, University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg. Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer. United States. https://doi.org/10.1116/1.3256200
Figueiras, F, Rauwel, E, Amaral, V S, Vyshatko, N, Kholkin, A L, Soyer, C, Remiens, D, Shvartsman, V V, Borisov, P, Kleemann, W, Department of Ceramics and Glass Engineering and CICECO, University of Aveiro, 3810-193 Aveiro, IENM-DOAE-MIMM-IEMN, 59655 Villeneuve d'Ascq, and Department of Physics, University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg. Fri . "Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer". United States. https://doi.org/10.1116/1.3256200.
@article{osti_22053604,
title = {Study of Ni{sub 2}-Mn-Ga phase formation by magnetron sputtering film deposition at low temperature onto Si substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} buffer},
author = {Figueiras, F and Rauwel, E and Amaral, V S and Vyshatko, N and Kholkin, A L and Soyer, C and Remiens, D and Shvartsman, V V and Borisov, P and Kleemann, W and Department of Ceramics and Glass Engineering and CICECO, University of Aveiro, 3810-193 Aveiro and IENM-DOAE-MIMM-IEMN, 59655 Villeneuve d'Ascq and Department of Physics, University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg},
abstractNote = {Film deposition of Ni{sub 2}MnGa phaselike alloy by radio frequency (rf) magnetron sputtering was performed onto bare Si(100) substrates and LaNiO{sub 3}/Pb(Ti,Zr)O{sub 3} (LNO/PZT) ferroelectric buffer layer near room temperature. The prepared samples were characterized using conventional x-ray diffraction (XRD), superconducting quantum interference device, and electron dispersive x-ray spectroscopy from scanning electron microscope observations. The optimized films deposited under high rf power and low argon pressure present good surface quality and highly textured phase crystallization. The positioning distance between the substrate and the target-holder axis has some limited effect on the film's composition due to the specific diffusion behavior of each element in the sputtering plasma. Extended four pole high resolution XRD analysis allowed one to discriminate the intended Ni-Mn-Ga tetragonal martensitic phase induced by the (100) LNO/PZT oriented buffer. This low temperature process appears to be very promising, allowing separate control of the functional layer's properties, while trying to achieve high electromagnetoelastic coupling.},
doi = {10.1116/1.3256200},
url = {https://www.osti.gov/biblio/22053604}, journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 1,
volume = 28,
place = {United States},
year = {2010},
month = {1}
}