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Title: Sputter-deposited (Pb,La)(Zr,Ti)O{sub 3} thin films: Effect of substrate and optical properties

Abstract

Optically transparent (Pb,La)(Zr,Ti)O{sub 3} (PLZT) thin films were sputter-deposited on SrTiO{sub 3}(001) and MgO(001) substrates with a SrRuO{sub 3}(110) bottom electrode. X-ray diffraction analysis showed epitaxial growth of monocrystalline PLZT, with (001) rocking curve full width at half maxima of {approx}0.03 degree sign and {approx}0.3 degree sign for films deposited on SrTiO{sub 3} and MgO, respectively. In-plane epitaxial alignment of the SrRuO{sub 3} and PLZT epilayers was verified from {phi}-scans. It was established from atomic force microscopy measurements that the PLZT surface roughness meets the requirement for optical waveguide applications. Recorded P-E loops for films grown on both substrates showed a remanent polarization of {approx}36 {mu}C/cm{sup 2}. The refractive index of the PLZT layer was estimated from rutile prism coupling measurements at {approx}2.56 for {lambda}=633 nm, consistent with data obtained by spectroscopic ellipsometry. The ferroelectric and optical characteristics of the films, as well as their surface roughness, were not appreciably different for the two substrates. This makes MgO the preferred choice of substrate for optical waveguide devices due to its low refractive index compared to that of SrTiO{sub 3}.

Authors:
; ; ;  [1]
  1. Department of Electronics and Telecommunications, Norwegian University of Science and Technology (NTNU), NO-7491 Trondheim (Norway)
Publication Date:
OSTI Identifier:
22053456
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 27; Journal Issue: 3; Other Information: (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DEPOSITION; ELLIPSOMETRY; EPITAXY; FERROELECTRIC MATERIALS; LAYERS; MAGNESIUM OXIDES; NEUTRON DIFFRACTION; PLZT; POLARIZATION; REFRACTIVE INDEX; ROUGHNESS; SPUTTERING; STRONTIUM TITANATES; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Nordseth, Ornulf, Tybell, Thomas, Grepstad, Jostein K, Roeyset, Arne, and SINTEF Materials and Chemistry, NO-7465 Trondheim. Sputter-deposited (Pb,La)(Zr,Ti)O{sub 3} thin films: Effect of substrate and optical properties. United States: N. p., 2009. Web. doi:10.1116/1.3117243.
Nordseth, Ornulf, Tybell, Thomas, Grepstad, Jostein K, Roeyset, Arne, & SINTEF Materials and Chemistry, NO-7465 Trondheim. Sputter-deposited (Pb,La)(Zr,Ti)O{sub 3} thin films: Effect of substrate and optical properties. United States. https://doi.org/10.1116/1.3117243
Nordseth, Ornulf, Tybell, Thomas, Grepstad, Jostein K, Roeyset, Arne, and SINTEF Materials and Chemistry, NO-7465 Trondheim. Fri . "Sputter-deposited (Pb,La)(Zr,Ti)O{sub 3} thin films: Effect of substrate and optical properties". United States. https://doi.org/10.1116/1.3117243.
@article{osti_22053456,
title = {Sputter-deposited (Pb,La)(Zr,Ti)O{sub 3} thin films: Effect of substrate and optical properties},
author = {Nordseth, Ornulf and Tybell, Thomas and Grepstad, Jostein K and Roeyset, Arne and SINTEF Materials and Chemistry, NO-7465 Trondheim},
abstractNote = {Optically transparent (Pb,La)(Zr,Ti)O{sub 3} (PLZT) thin films were sputter-deposited on SrTiO{sub 3}(001) and MgO(001) substrates with a SrRuO{sub 3}(110) bottom electrode. X-ray diffraction analysis showed epitaxial growth of monocrystalline PLZT, with (001) rocking curve full width at half maxima of {approx}0.03 degree sign and {approx}0.3 degree sign for films deposited on SrTiO{sub 3} and MgO, respectively. In-plane epitaxial alignment of the SrRuO{sub 3} and PLZT epilayers was verified from {phi}-scans. It was established from atomic force microscopy measurements that the PLZT surface roughness meets the requirement for optical waveguide applications. Recorded P-E loops for films grown on both substrates showed a remanent polarization of {approx}36 {mu}C/cm{sup 2}. The refractive index of the PLZT layer was estimated from rutile prism coupling measurements at {approx}2.56 for {lambda}=633 nm, consistent with data obtained by spectroscopic ellipsometry. The ferroelectric and optical characteristics of the films, as well as their surface roughness, were not appreciably different for the two substrates. This makes MgO the preferred choice of substrate for optical waveguide devices due to its low refractive index compared to that of SrTiO{sub 3}.},
doi = {10.1116/1.3117243},
url = {https://www.osti.gov/biblio/22053456}, journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 3,
volume = 27,
place = {United States},
year = {2009},
month = {5}
}