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Title: Experimental verification of the shape of the excitation depth distribution function for AES

Abstract

In the common formalism of AES, it is assumed that the in-depth distribution of ionizations is uniform. There are experimental indications that this assumption may not be true for certain primary electron energies and solids. The term ''excitation depth distribution function'' (EXDDF) has been introduced to describe the distribution of ionizations at energies used in AES. This function is conceptually equivalent to the Phi-rho-z function of electron microprobe analysis (EPMA). There are, however, experimental difficulties to determine this function in particular for energies below {approx} 10 keV. In the present paper, we investigate the possibility of determining the shape of the EXDDF from the background of inelastically scattered electrons on the low energy side of the Auger electron features in the electron energy spectra. The experimentally determined EXDDFs are compared with the EXDDFs determined from Monte Carlo simulations of electron trajectories in solids. It is found that this technique is useful for the experimental determination of the EXDDF function.

Authors:
;  [1];  [2]
  1. Department of Physics and Chemistry, University of Southern Denmark, DK-5230 Odense M (Denmark)
  2. (Poland)
Publication Date:
OSTI Identifier:
22051361
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Other Information: (c) 2011 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; AUGER ELECTRON SPECTROSCOPY; ELECTRON MICROPROBE ANALYSIS; ELECTRONS; ENERGY SPECTRA; EXCITATION; EXPERIMENTAL DATA; IONIZATION; KEV RANGE 01-10; MONTE CARLO METHOD; SOLIDS; SPATIAL DISTRIBUTION; VERIFICATION

Citation Formats

Tougaard, S., Jablonski, A., and Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224 Warsaw. Experimental verification of the shape of the excitation depth distribution function for AES. United States: N. p., 2011. Web. doi:10.1116/1.3609774.
Tougaard, S., Jablonski, A., & Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224 Warsaw. Experimental verification of the shape of the excitation depth distribution function for AES. United States. doi:10.1116/1.3609774.
Tougaard, S., Jablonski, A., and Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224 Warsaw. Thu . "Experimental verification of the shape of the excitation depth distribution function for AES". United States. doi:10.1116/1.3609774.
@article{osti_22051361,
title = {Experimental verification of the shape of the excitation depth distribution function for AES},
author = {Tougaard, S. and Jablonski, A. and Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224 Warsaw},
abstractNote = {In the common formalism of AES, it is assumed that the in-depth distribution of ionizations is uniform. There are experimental indications that this assumption may not be true for certain primary electron energies and solids. The term ''excitation depth distribution function'' (EXDDF) has been introduced to describe the distribution of ionizations at energies used in AES. This function is conceptually equivalent to the Phi-rho-z function of electron microprobe analysis (EPMA). There are, however, experimental difficulties to determine this function in particular for energies below {approx} 10 keV. In the present paper, we investigate the possibility of determining the shape of the EXDDF from the background of inelastically scattered electrons on the low energy side of the Auger electron features in the electron energy spectra. The experimentally determined EXDDFs are compared with the EXDDFs determined from Monte Carlo simulations of electron trajectories in solids. It is found that this technique is useful for the experimental determination of the EXDDF function.},
doi = {10.1116/1.3609774},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}