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Title: Formation of tetragonal or monoclinic ZrO{sub 2} coatings by oxygen plasma treatment of Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy thin films

Abstract

The authors report on the production of stable nanostructured tetragonal and/or monoclinic ZrO{sub 2} nanopillars achieved by means of oxygen plasma treatment of ternary Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy films. The Zr-based metallic glass thin films were successfully deposited by magnetron sputtering and subsequently subjected to oxygen plasma for various exposure times. The compositions of the oxidized films were determined by Auger electron spectroscopy and X-Ray photoelectron spectroscopy depth profiling while the surface morphology was evaluated by means of atomic force microscopy and scanning electron microscopy. X-Ray diffraction was used for the structural analysis. Our results show that, depending on the length of time of oxygen plasma treatment, tetragonal and/or monoclinic ZrO{sub 2} films can be formed, the surface morphology of which exhibit nanopillar structures with an increased effective surface. These findings provide an easy and efficient way for growing ZrO{sub 2} coatings with a predefined structure suitable for protective and possibly for catalytic applications.

Authors:
; ; ; ;  [1];  [2];  [3];  [3]
  1. University of Ioannina, Department of Physics, Ioannina 45110 (Greece)
  2. (Slovenia)
  3. (Greece)
Publication Date:
OSTI Identifier:
22051358
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5; Other Information: (c) 2011 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1553-1813
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; COATINGS; COPPER ALLOYS; MAGNETRONS; METALLIC GLASSES; MONOCLINIC LATTICES; MORPHOLOGY; NANOSTRUCTURES; NIOBIUM ALLOYS; OXYGEN; PLASMA; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TETRAGONAL LATTICES; THIN FILMS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM ALLOYS; ZIRCONIUM OXIDES

Citation Formats

Panagiotopoulos, N. T., Kovac, J., Mozetic, M., Patsalas, P., Evangelakis, G. A., Department of Surface Engineering and Optoelectronics, Jozef Stefan Institute, Ljubljana 1000, University of Ioannina, Department of Materials Science and Engineering, Ioannina 45110, and University of Ioannina, Department of Physics, Ioannina 45110. Formation of tetragonal or monoclinic ZrO{sub 2} coatings by oxygen plasma treatment of Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy thin films. United States: N. p., 2011. Web. doi:10.1116/1.3625567.
Panagiotopoulos, N. T., Kovac, J., Mozetic, M., Patsalas, P., Evangelakis, G. A., Department of Surface Engineering and Optoelectronics, Jozef Stefan Institute, Ljubljana 1000, University of Ioannina, Department of Materials Science and Engineering, Ioannina 45110, & University of Ioannina, Department of Physics, Ioannina 45110. Formation of tetragonal or monoclinic ZrO{sub 2} coatings by oxygen plasma treatment of Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy thin films. United States. doi:10.1116/1.3625567.
Panagiotopoulos, N. T., Kovac, J., Mozetic, M., Patsalas, P., Evangelakis, G. A., Department of Surface Engineering and Optoelectronics, Jozef Stefan Institute, Ljubljana 1000, University of Ioannina, Department of Materials Science and Engineering, Ioannina 45110, and University of Ioannina, Department of Physics, Ioannina 45110. Thu . "Formation of tetragonal or monoclinic ZrO{sub 2} coatings by oxygen plasma treatment of Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy thin films". United States. doi:10.1116/1.3625567.
@article{osti_22051358,
title = {Formation of tetragonal or monoclinic ZrO{sub 2} coatings by oxygen plasma treatment of Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy thin films},
author = {Panagiotopoulos, N. T. and Kovac, J. and Mozetic, M. and Patsalas, P. and Evangelakis, G. A. and Department of Surface Engineering and Optoelectronics, Jozef Stefan Institute, Ljubljana 1000 and University of Ioannina, Department of Materials Science and Engineering, Ioannina 45110 and University of Ioannina, Department of Physics, Ioannina 45110},
abstractNote = {The authors report on the production of stable nanostructured tetragonal and/or monoclinic ZrO{sub 2} nanopillars achieved by means of oxygen plasma treatment of ternary Zr{sub 74.7}Cu{sub 19.7}Nb{sub 5.6} glassy films. The Zr-based metallic glass thin films were successfully deposited by magnetron sputtering and subsequently subjected to oxygen plasma for various exposure times. The compositions of the oxidized films were determined by Auger electron spectroscopy and X-Ray photoelectron spectroscopy depth profiling while the surface morphology was evaluated by means of atomic force microscopy and scanning electron microscopy. X-Ray diffraction was used for the structural analysis. Our results show that, depending on the length of time of oxygen plasma treatment, tetragonal and/or monoclinic ZrO{sub 2} films can be formed, the surface morphology of which exhibit nanopillar structures with an increased effective surface. These findings provide an easy and efficient way for growing ZrO{sub 2} coatings with a predefined structure suitable for protective and possibly for catalytic applications.},
doi = {10.1116/1.3625567},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
issn = {1553-1813},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}