Levitation and collection of diamond fine particles in the rf plasma chamber equipped with a hot filament

Journal Article · Tue Nov 15 00:00:00 EST 2011 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3655443· OSTI ID:22047097

Shimizu, S; Shimizu, T; Thomas, H M; Morfill, G E ^[1]; Jacob, W ^[2]

---

1. Max-Planck-Institut fuer extraterrestrische Physik, Giessenbachstrasse, D-85748 Garching (Germany)
2. Max-Planck-Institut fuer Plasmaphysik, EURATOM Association, Boltzmannstrasse 2, D-85748 Garching (Germany)

We demonstrate the levitation of diamond fine particles in a H{sub 2} rf plasma chamber equipped with a hot filament and heated electrodes. The levitation conditions should be carefully chosen to compensate the strong thermophoretic forces caused by the filament and the electrodes. This levitation technique with the existence of a hot filament can be applied, e.g., for the efficient growth of diamond layers on seed particles injected and levitated in an rf plasma with reactive gases, e.g., CH{sub 4}/H{sub 2}. Additionally, the method for direct capture of levitated particles on a planar substrate was established, which is useful if it is necessary to analyze the particles after the levitation.

• OSTI ID: 22047097
• Journal Information: Physics of Plasmas, Vol. 18, Issue 11; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DIAMONDS
ELECTRODES
GASES
HYDROGEN
LEVITATION
METHANE
MOLECULES
PARTICLES
PLASMA
PLASMA FILAMENT
SUBSTRATES
THERMOPHORESIS