skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Anomalous evolution of Ar metastable density with electron density in high density Ar discharge

Abstract

Recently, an anomalous evolution of argon metastable density with plasma discharge power (electron density) was reported [A. M. Daltrini, S. A. Moshkalev, T. J. Morgan, R. B. Piejak, and W. G. Graham, Appl. Phys. Lett. 92, 061504 (2008)]. Although the importance of the metastable atom and its density has been reported in a lot of literature, however, a basic physics behind the anomalous evolution of metastable density has not been clearly understood yet. In this study, we investigated a simple global model to elucidate the underlying physics of the anomalous evolution of argon metastable density with the electron density. On the basis of the proposed simple model, we reproduced the anomalous evolution of the metastable density and disclosed the detailed physics for the anomalous result. Drastic changes of dominant mechanisms for the population and depopulation processes of Ar metastable atoms with electron density, which take place even in relatively low electron density regime, is the clue to understand the result.

Authors:
;  [1]; ;  [2];
  1. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701 (Korea, Republic of)
  2. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon, 305-306 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22047000
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 18; Journal Issue: 10; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; ATOMS; ELECTRIC DISCHARGES; ELECTRON DENSITY; IONIZATION; METASTABLE STATES; PLASMA; PLASMA DENSITY

Citation Formats

Park, Min, Chang, Hong-Young, You, Shin-Jae, Kim, Jung-Hyung, and Shin, Yong-Hyeon. Anomalous evolution of Ar metastable density with electron density in high density Ar discharge. United States: N. p., 2011. Web. doi:10.1063/1.3640518.
Park, Min, Chang, Hong-Young, You, Shin-Jae, Kim, Jung-Hyung, & Shin, Yong-Hyeon. Anomalous evolution of Ar metastable density with electron density in high density Ar discharge. United States. doi:10.1063/1.3640518.
Park, Min, Chang, Hong-Young, You, Shin-Jae, Kim, Jung-Hyung, and Shin, Yong-Hyeon. Sat . "Anomalous evolution of Ar metastable density with electron density in high density Ar discharge". United States. doi:10.1063/1.3640518.
@article{osti_22047000,
title = {Anomalous evolution of Ar metastable density with electron density in high density Ar discharge},
author = {Park, Min and Chang, Hong-Young and You, Shin-Jae and Kim, Jung-Hyung and Shin, Yong-Hyeon},
abstractNote = {Recently, an anomalous evolution of argon metastable density with plasma discharge power (electron density) was reported [A. M. Daltrini, S. A. Moshkalev, T. J. Morgan, R. B. Piejak, and W. G. Graham, Appl. Phys. Lett. 92, 061504 (2008)]. Although the importance of the metastable atom and its density has been reported in a lot of literature, however, a basic physics behind the anomalous evolution of metastable density has not been clearly understood yet. In this study, we investigated a simple global model to elucidate the underlying physics of the anomalous evolution of argon metastable density with the electron density. On the basis of the proposed simple model, we reproduced the anomalous evolution of the metastable density and disclosed the detailed physics for the anomalous result. Drastic changes of dominant mechanisms for the population and depopulation processes of Ar metastable atoms with electron density, which take place even in relatively low electron density regime, is the clue to understand the result.},
doi = {10.1063/1.3640518},
journal = {Physics of Plasmas},
issn = {1070-664X},
number = 10,
volume = 18,
place = {United States},
year = {2011},
month = {10}
}