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Title: Electrical time resolved metrology of dust particles growing in low pressure cold plasmas

Abstract

The electrical parameters of a capacitively coupled radiofrequency (CCRF) discharge change significantly when dust arises in the discharge. This work demonstrates the ability to follow in real time the evolution of the size and of the concentration of dust particles forming in a CCRF discharge from the variation of the electron density and of the self-bias voltage of the active electrode. According to experimental findings, it appears that the variation of this self-bias voltage depends on the surface of the dust particles. This trend is confirmed by an analytical modelling considering the low frequency behaviour of the phenomenon.

Authors:
 [1];  [2];  [3]
  1. PRISME, Orleans University, 12 rue de Blois BP 6744, 45067 Orleans cedex 2 (France)
  2. LPCQ, Mouloud Mammeri University, Tizi-Ouzou (Algeria)
  3. GREMI, Orleans University, 14 rue d'Issoudun BP 6744, 45067 Orleans cedex 2 (France)
Publication Date:
OSTI Identifier:
22043529
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 18; Journal Issue: 9; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLD PLASMA; DUSTS; ELECTRODES; ELECTRON DENSITY; HIGH-FREQUENCY DISCHARGES; PLASMA DENSITY; PLASMA DIAGNOSTICS; RADIOWAVE RADIATION; SIMULATION; SURFACES; TIME RESOLUTION

Citation Formats

Wattieaux, Gaeetan, Mezeghrane, Abdelaziz, and Boufendi, Laiefa. Electrical time resolved metrology of dust particles growing in low pressure cold plasmas. United States: N. p., 2011. Web. doi:10.1063/1.3630935.
Wattieaux, Gaeetan, Mezeghrane, Abdelaziz, & Boufendi, Laiefa. Electrical time resolved metrology of dust particles growing in low pressure cold plasmas. United States. doi:10.1063/1.3630935.
Wattieaux, Gaeetan, Mezeghrane, Abdelaziz, and Boufendi, Laiefa. 2011. "Electrical time resolved metrology of dust particles growing in low pressure cold plasmas". United States. doi:10.1063/1.3630935.
@article{osti_22043529,
title = {Electrical time resolved metrology of dust particles growing in low pressure cold plasmas},
author = {Wattieaux, Gaeetan and Mezeghrane, Abdelaziz and Boufendi, Laiefa},
abstractNote = {The electrical parameters of a capacitively coupled radiofrequency (CCRF) discharge change significantly when dust arises in the discharge. This work demonstrates the ability to follow in real time the evolution of the size and of the concentration of dust particles forming in a CCRF discharge from the variation of the electron density and of the self-bias voltage of the active electrode. According to experimental findings, it appears that the variation of this self-bias voltage depends on the surface of the dust particles. This trend is confirmed by an analytical modelling considering the low frequency behaviour of the phenomenon.},
doi = {10.1063/1.3630935},
journal = {Physics of Plasmas},
number = 9,
volume = 18,
place = {United States},
year = 2011,
month = 9
}
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