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Title: Low emissivity Ag/Ta/glass multilayer thin films deposited by sputtering

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3636107· OSTI ID:22038703
 [1];  [1];  [2]
  1. Division of Advanced Materials Engineering, Kongju National University, Budaedong, Cheonan City (Korea, Republic of)
  2. Green Home Energy Technology Center, Cheonan City (Korea, Republic of)

Ta is deposited on a glass substrate as an interlayer for the two-dimensional growth of Ag thin films because Ta has good thermal stability and can induce a negative surface-energy change in Ag/glass. From the transmission electron microscopy results, we concluded that the Ag crystals in the bottom layer (seemingly on Ag/Ta) were flattened; this was rarely observed in the three-dimensional growth mode. Comparing Ag/Ta/glass with Ag/glass, we found that the Ta interlayer was effective in reducing both the resistance and the emissivity, accompanied by the relatively high transmittance in the visible region. In particular, Ag(9 nm)/Ta(1 nm)/glass film showed 0.08 of the emissivity, including {approx}61% of the transmittance in the visible region (wavelength: 550 nm).

OSTI ID:
22038703
Journal Information:
Journal of Applied Physics, Vol. 110, Issue 6; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English