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Title: Measurement of electron density with the phase-resolved cut-off probe method

Abstract

The phase resolved cut-off probe method, a precise measurement method for the electron density, was recently proposed [J. H. Kwon et al., Appl. Phys. Lett. 96, 081502 (2010)]. This paper presents the measurements of electron density using the method under various experimental conditions (different pressures, powers, chamber volumes, and discharge sources). The result shows that the method is not only in good agreement with the previous method using wave transmittance under various experimental conditions but it is also able to find the cut-off point clearly even under difficult conditions such as high pressure ({approx} 1 Torr), high discharge power, and small plasma volume. The details of the experimental setup, the operating mechanism of the probe method, and the data processing procedure (algorithm) are also addressed. Furthermore, the reliability of the measurement method is investigated by using an electromagnetic field simulation with cold plasma model (CST-Drude model, Computer Simulation Technology).

Authors:
; ;  [1]; ; ;  [2]
  1. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon, Korea 305-701 (Korea, Republic of)
  2. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon, Korea 305-306 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22036659
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 110; Journal Issue: 2; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ALGORITHMS; COLD PLASMA; COMPUTERIZED SIMULATION; DATA PROCESSING; ELECTRIC DISCHARGES; ELECTROMAGNETIC FIELDS; ELECTRON DENSITY; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA SIMULATION

Citation Formats

Kwon, J. H., Kim, D. W., Na, B. K., You, S. J., Kim, J. H., and Shin, Y. H. Measurement of electron density with the phase-resolved cut-off probe method. United States: N. p., 2011. Web. doi:10.1063/1.3586561.
Kwon, J. H., Kim, D. W., Na, B. K., You, S. J., Kim, J. H., & Shin, Y. H. Measurement of electron density with the phase-resolved cut-off probe method. United States. doi:10.1063/1.3586561.
Kwon, J. H., Kim, D. W., Na, B. K., You, S. J., Kim, J. H., and Shin, Y. H. Fri . "Measurement of electron density with the phase-resolved cut-off probe method". United States. doi:10.1063/1.3586561.
@article{osti_22036659,
title = {Measurement of electron density with the phase-resolved cut-off probe method},
author = {Kwon, J. H. and Kim, D. W. and Na, B. K. and You, S. J. and Kim, J. H. and Shin, Y. H.},
abstractNote = {The phase resolved cut-off probe method, a precise measurement method for the electron density, was recently proposed [J. H. Kwon et al., Appl. Phys. Lett. 96, 081502 (2010)]. This paper presents the measurements of electron density using the method under various experimental conditions (different pressures, powers, chamber volumes, and discharge sources). The result shows that the method is not only in good agreement with the previous method using wave transmittance under various experimental conditions but it is also able to find the cut-off point clearly even under difficult conditions such as high pressure ({approx} 1 Torr), high discharge power, and small plasma volume. The details of the experimental setup, the operating mechanism of the probe method, and the data processing procedure (algorithm) are also addressed. Furthermore, the reliability of the measurement method is investigated by using an electromagnetic field simulation with cold plasma model (CST-Drude model, Computer Simulation Technology).},
doi = {10.1063/1.3586561},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 2,
volume = 110,
place = {United States},
year = {2011},
month = {7}
}