Measurement of electron density with the phase-resolved cut-off probe method
- Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon, Korea 305-701 (Korea, Republic of)
- Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon, Korea 305-306 (Korea, Republic of)
The phase resolved cut-off probe method, a precise measurement method for the electron density, was recently proposed [J. H. Kwon et al., Appl. Phys. Lett. 96, 081502 (2010)]. This paper presents the measurements of electron density using the method under various experimental conditions (different pressures, powers, chamber volumes, and discharge sources). The result shows that the method is not only in good agreement with the previous method using wave transmittance under various experimental conditions but it is also able to find the cut-off point clearly even under difficult conditions such as high pressure ({approx} 1 Torr), high discharge power, and small plasma volume. The details of the experimental setup, the operating mechanism of the probe method, and the data processing procedure (algorithm) are also addressed. Furthermore, the reliability of the measurement method is investigated by using an electromagnetic field simulation with cold plasma model (CST-Drude model, Computer Simulation Technology).
- OSTI ID:
- 22036659
- Journal Information:
- Journal of Applied Physics, Vol. 110, Issue 2; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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