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Title: Optical properties of grooved silicon microstructures: Theory and experiment

Abstract

The reflection spectra of grooved silicon structures consisting of alternating silicon walls and grooves (air channels) with a period of a = 4-6 {mu}m are studied experimentally and theoretically in the mid-IR spectral range (2-25 {mu}m) upon irradiation of samples by normally incident light polarized along and perpendicular to silicon layers. The calculation is performed by the scattering matrix method taking into account Rayleigh scattering losses in a grooved layer by adding imaginary parts to the refractive indices of silicon and air in grooved regions. The experimental and calculated reflection spectra are in good agreement in the entire spectral range studied. The analysis of experimental and calculated spectra gave close values of the effective refractive indices and birefringence of the studied structures in the long-wavelength spectral region. The values calculated in the effective medium model in the long-wavelength approximation ({lambda} Much-Greater-Than a) gave considerably understated values. The obtained results confirm the efficiency of the scattering matrix method for describing the optical properties of silicon microstructures.

Authors:
 [1];  [2];  [3]; ;  [4];  [1]
  1. Moscow State University (Russian Federation)
  2. Russian Academy of Sciences, Ioffe Physicotechnical Institute (Russian Federation)
  3. Trinity College Dublin (Ireland)
  4. Russian Academy of Sciences, Prokhorov General Physics Institute (Russian Federation)
Publication Date:
OSTI Identifier:
22028058
Resource Type:
Journal Article
Journal Name:
Journal of Experimental and Theoretical Physics
Additional Journal Information:
Journal Volume: 113; Journal Issue: 1; Other Information: Copyright (c) 2011 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7761
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AIR; APPROXIMATIONS; BIREFRINGENCE; EFFICIENCY; INTERMEDIATE INFRARED RADIATION; IRRADIATION; LAYERS; MICROSTRUCTURE; RAYLEIGH SCATTERING; REFRACTIVE INDEX; S MATRIX; SILICON; SPECTRAL REFLECTANCE

Citation Formats

Dyakov, S. A., E-mail: dyakovs@tcd.ie, Astrova, E. V., Perova, T. S., Tikhodeev, S. G., Gippius, N. A., and Timoshenko, V. Yu. Optical properties of grooved silicon microstructures: Theory and experiment. United States: N. p., 2011. Web. doi:10.1134/S1063776111060161.
Dyakov, S. A., E-mail: dyakovs@tcd.ie, Astrova, E. V., Perova, T. S., Tikhodeev, S. G., Gippius, N. A., & Timoshenko, V. Yu. Optical properties of grooved silicon microstructures: Theory and experiment. United States. doi:10.1134/S1063776111060161.
Dyakov, S. A., E-mail: dyakovs@tcd.ie, Astrova, E. V., Perova, T. S., Tikhodeev, S. G., Gippius, N. A., and Timoshenko, V. Yu. Fri . "Optical properties of grooved silicon microstructures: Theory and experiment". United States. doi:10.1134/S1063776111060161.
@article{osti_22028058,
title = {Optical properties of grooved silicon microstructures: Theory and experiment},
author = {Dyakov, S. A., E-mail: dyakovs@tcd.ie and Astrova, E. V. and Perova, T. S. and Tikhodeev, S. G. and Gippius, N. A. and Timoshenko, V. Yu.},
abstractNote = {The reflection spectra of grooved silicon structures consisting of alternating silicon walls and grooves (air channels) with a period of a = 4-6 {mu}m are studied experimentally and theoretically in the mid-IR spectral range (2-25 {mu}m) upon irradiation of samples by normally incident light polarized along and perpendicular to silicon layers. The calculation is performed by the scattering matrix method taking into account Rayleigh scattering losses in a grooved layer by adding imaginary parts to the refractive indices of silicon and air in grooved regions. The experimental and calculated reflection spectra are in good agreement in the entire spectral range studied. The analysis of experimental and calculated spectra gave close values of the effective refractive indices and birefringence of the studied structures in the long-wavelength spectral region. The values calculated in the effective medium model in the long-wavelength approximation ({lambda} Much-Greater-Than a) gave considerably understated values. The obtained results confirm the efficiency of the scattering matrix method for describing the optical properties of silicon microstructures.},
doi = {10.1134/S1063776111060161},
journal = {Journal of Experimental and Theoretical Physics},
issn = {1063-7761},
number = 1,
volume = 113,
place = {United States},
year = {2011},
month = {7}
}