Altering the sulfur content in the propanethiol plasma polymers using the capacitive-to-inductive mode transition in inductively coupled plasma discharge

Journal Article · Mon Feb 13 00:00:00 EST 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3686902· OSTI ID:22025434

Thiry, Damien; Britun, Nikolay; Konstantinidis, Stephanos; Dauchot, Jean-Pierre; Denis, Laurent ^[1]; Snyders, Rony ^[1]

---

1. Chimie des Interactions Plasma Surface (ChIPS), CIRMAP, Universite de Mons, 20 Place du Parc, B-7000 Mons (Belgium)

The effect of the transition from capacitive (E) to inductive (H) mode on propanethiol plasma polymer films properties was investigated by optical emission as well as by x-ray photoelectron spectroscopy. The E mode is characterized by low deposition rate and by high sulfur content in the films ({approx}40% vs {approx}20% in H mode). After aging, a strong decrease of sulfur to carbon content (from {approx}0.75 to 0.13), attributed to desorption of unbounded sulfur-based molecules (e.g., H{sub 2}S), is detected at low power in E mode. The importance of the E-H transition for altering the film properties is highlighted.

• OSTI ID: 22025434
• Journal Information: Applied Physics Letters, Vol. 100, Issue 7; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AGING
CARBON
COUPLING
DEPOSITION
DESORPTION
ELECTRIC DISCHARGES
EMISSION SPECTROSCOPY
FILMS
HYDROGEN
MOLECULES
ORGANIC POLYMERS
PHOTOLUMINESCENCE
PLASMA
SULFUR
SULFUR CONTENT
X-RAY PHOTOELECTRON SPECTROSCOPY