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Title: Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes

Abstract

A new highly efficient design for semiconductor detectors of intermediate-energy electrons (1-50 keV) for application in scanning electron microscopes is proposed. Calculations of the response function of advanced detectors and control experiments show that the efficiency of the developed devices increases on average twofold, which is a significant positive factor in the operation of modern electron microscopes in the mode of low currents and at low primary electron energies.

Authors:
 [1];  [2];  [1]
  1. Moscow State University (Russian Federation)
  2. Russian Academy of Sciences, Physical Technological Institute (Russian Federation)
Publication Date:
OSTI Identifier:
22004655
Resource Type:
Journal Article
Journal Name:
Semiconductors
Additional Journal Information:
Journal Volume: 46; Journal Issue: 6; Other Information: Copyright (c) 2012 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7826
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CONTROL; EFFICIENCY; ELECTRON MICROSCOPES; ELECTRONS; RESPONSE FUNCTIONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR MATERIALS

Citation Formats

Rau, E. I., Orlikovskiy, N. A., and Ivanova, E. S. Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes. United States: N. p., 2012. Web. doi:10.1134/S1063782612060139.
Rau, E. I., Orlikovskiy, N. A., & Ivanova, E. S. Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes. United States. doi:10.1134/S1063782612060139.
Rau, E. I., Orlikovskiy, N. A., and Ivanova, E. S. Fri . "Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes". United States. doi:10.1134/S1063782612060139.
@article{osti_22004655,
title = {Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes},
author = {Rau, E. I. and Orlikovskiy, N. A. and Ivanova, E. S.},
abstractNote = {A new highly efficient design for semiconductor detectors of intermediate-energy electrons (1-50 keV) for application in scanning electron microscopes is proposed. Calculations of the response function of advanced detectors and control experiments show that the efficiency of the developed devices increases on average twofold, which is a significant positive factor in the operation of modern electron microscopes in the mode of low currents and at low primary electron energies.},
doi = {10.1134/S1063782612060139},
journal = {Semiconductors},
issn = {1063-7826},
number = 6,
volume = 46,
place = {United States},
year = {2012},
month = {6}
}