Microcantilever sensors

Title: Microcantilever sensors

Full Record
Other Related Research

Abstract

Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.

Authors:

Thundat, T; Warmack, R J ^[1]; Oden, P I ^[1]; Dasktos, P G; Chen, G Y ^[1]

Oak Ridge National Lab., TN (United States)

Publication Date:: 1996-04-01

Research Org.:: Oak Ridge National Lab., TN (United States)

Sponsoring Org.:: USDOE, Washington, DC (United States)

OSTI Identifier:: 217654

Report Number(s):: CONF-960165-1
ON: DE96008678

DOE Contract Number:: AC05-96OR22464

Resource Type:: Conference

Resource Relation:: Conference: 16. Werner Brandt workshop on charged particle penetration phenonema, Oak Ridge, TN (United States), 7-9 Jan 1996; Other Information: PBD: [1996]

Country of Publication:: United States

Language:: English

Subject:: 40 CHEMISTRY; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; CHEMICAL ANALYSIS; MEASURING INSTRUMENTS; ADSORPTION; MINIATURIZATION; BENDING; RESONANCE; SPRINGS; SILICON; COATINGS

Citation Formats


                    Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, and Tennessee Univ., Knoxville, TN. Microcantilever sensors.  United States: N. p., 1996. 
        Web.

Copy to clipboard


                    Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, & Tennessee Univ., Knoxville, TN. Microcantilever sensors.  United States.

Copy to clipboard


                    Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, and Tennessee Univ., Knoxville, TN. Mon .  
        "Microcantilever sensors".  United States.  https://www.osti.gov/servlets/purl/217654.

Copy to clipboard


                    
@article{osti_217654,

  title        = {Microcantilever sensors},

  author       = {Thundat, T and Warmack, R J and Oden, P I and Oak Ridge Associated Universities, Inc., TN and Dasktos, P G and Chen, G Y and Tennessee Univ., Knoxville, TN},

  abstractNote = {Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/217654},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1996},

  month        = {4}

}

Copy to clipboard

Conference:

View Conference (0.36 MB)

Other availability

Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share:

Export Metadata

Save to My Library

Similar records in OSTI.GOV collections:

Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

Journal Article Chen, G Y ; Thundat, T ; Wachter, E A ; ... - Journal of Applied Physics

It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change canmore »« less
https://doi.org/10.1063/1.359562
Vapor detection using resonating microcantilevers

Journal Article Thundat, T ; Chen, G Y ; Warmack, R J ; ... - Analytical Chemistry (Washington); (United States)

Changes in the resonance frequency of microcantilevers due to adsorption of analyte vapor on exposed surfaces is shown to provide a novel means for detection of the analyte. Frequency changes can be due to mass loading or adsorption-induced changes in cantilever spring constant. Sensitization to water vapor is demonstrated by coating cantilever surfaces with hygroscopic materials, such as phosphoric acid. Cantilevers coated with a thin gelatin film exhibit high sensitivity and a linear response with changes in relative humidity, apparently due to changes in the spring constant of the coated cantilever. In addition to frequency response, static cantilever deflection alsomore »« less
https://doi.org/10.1021/ac00099a006
Environmental Monitoring Using Microcantilever Sensors

Conference Thundat, Thomas ; Brown, Gilbert M ; Ji, Hai-Feng

There is presently an urgent need for rugged, low cost sensing systems for real-time, in situ chemical sensors for characterization and monitoring of ground water, contaminated soil and process streams. Recent advances in designing and fabricating microcantilever beams capable of detecting extremely small forces, mechanical stress and mass additions offer the promising prospect of environmental sensing with unprecedented sensitivity and dynamic range. The resonance frequency of a cantilever beam varies sensitively as a function of molecular adsorption. In addition, when the adsorption is confined to one side of the cantilever, the cantilever undergoes deflection due to adsorption-induced variation in surfacemore »« less
Full Text Available
Explosive Vapor Detection Using Microcantilever Sensors

Conference Pinnaduwage, Lal A

MEMS-based microcantilever platforms have been used to develop extremely sensitive explosive vapour sensors. Two unique approaches of detecting of explosive vapours are demonstrated. In the first approach a cantilever beam coated with a selective layer undergoes bending and resonance frequency variation due to explosive vapour adsorption. The resonance frequency variation is due to mass loading while adsorption-induced cantilever bending is due to a differential stress due molecular adsorption. In the second approach that does not utilize selective coatings for speciation, detection is achieved by deflagration of adsorbed explosive molecules. Deflagration of adsorbed explosive molecules causes the cantilever to bend duemore »« less
Micromechanical calorimetric sensor

Patent Thundat, Thomas G ; Doktycz, Mitchel J

A calorimeter sensor apparatus is developed utilizing microcantilevered spring elements for detecting thermal changes within a sample containing biomolecules which undergo chemical and biochemical reactions. The spring element includes a bimaterial layer of chemicals on a coated region on at least one surface of the microcantilever. The chemicals generate a differential thermal stress across the surface upon reaction of the chemicals with an analyte or biomolecules within the sample due to the heat of chemical reactions in the sample placed on the coated region. The thermal stress across the spring element surface creates mechanical bending of the microcantilever. The springmore »« less
Full Text Available

Similar Records