MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms

Journal Article · Thu Nov 10 00:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3657870· OSTI ID:21612182

Knuffman, B; Steele, A V; McClelland, J J ^[1]; Orloff, J; Maazouz, M ^[2]

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1. Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899 (United States)
2. FEI Company, Hillsboro, OR 97124 (United States)

We have demonstrated high resolution focused ion beams based on a magneto-optical trap ion source (MOTIS), which takes advantage of the ultra cold temperatures of laser cooled atoms to produce high brightness, low emittance ion beams. We have created focused beams of both Cr{sup +} and Li{sup +} and present secondary electron micrographs obtained with these beams, demonstrating a focal spot size as low as 27 nm at a beam energy of 2 keV. This work shows that the MOTIS can be a useful source for focused ion beams that will open new opportunities for applications in materials characterization and metrology.

• OSTI ID: 21612182
• Journal Information: AIP Conference Proceedings, Vol. 1395, Issue 1; Conference: Conference on frontiers of characterization and metrology for nanoelectronics 2011, Grenoble (France), 23-26 May 2011; Other Information: DOI: 10.1063/1.3657870; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
74 ATOMIC AND MOLECULAR PHYSICS
ATOMS
BEAM EMITTANCE
BEAM PRODUCTION
BRIGHTNESS
CHROMIUM IONS
ELECTRONS
ION BEAMS
ION SOURCES
KEV RANGE
LASER RADIATION
LASERS
LITHIUM IONS
MAGNETO-OPTICAL EFFECTS
PHOTOIONIZATION
RADIATIVE COOLING
RESOLUTION
TRAPS
BEAMS
CHARGED PARTICLES
COOLING
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ENERGY RANGE
FERMIONS
IONIZATION
IONS
LEPTONS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
RADIATIONS