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Title: Damage and ablation thresholds of fused-silica in femtosecond regime

Abstract

We present an experimental and numerical study of the damage and ablation thresholds at the surface of a dielectric material, e.g., fused silica, using short pulses ranging from 7 to 300 fs. The relevant numerical criteria of damage and ablation thresholds are proposed consistently with experimental observations of the laser irradiated zone. These criteria are based on lattice thermal melting and electronic cohesion temperature, respectively. The importance of the three major absorption channels (multi-photon absorption, tunnel effect, and impact ionization) is investigated as a function of pulse duration (7-300 fs). Although the relative importance of the impact ionization process increases with the pulse duration, our results show that it plays a role even at short pulse duration (<50 fs). For few optical cycle pulses (7 fs), it is also shown that both damage and ablation fluence thresholds tend to coincide due to the sharp increase of the free electron density. This electron-driven ablation regime is of primary interest for thermal-free laser-matter interaction and therefore for the development of high quality micromachining processes.

Authors:
; ; ;  [1];  [2]; ; ; ;  [3]
  1. Laboratoire LP3, UMR 6182 CNRS - Universite de la Mediterranee, C. 917, 163, Av. de Luminy, 13288 Marseille cedex 9 (France)
  2. Laboratoire Hubert Curien - LaHC, UMR 5516 CNRS - Universite Jean Monnet, Bat. F, 18, rue Professeur B. Lauras, 42000 Saint-Etienne (France)
  3. INRS, Energie, Materiaux et Telecommunications, 1650 bld Lionel Boulet, Varennes (Quebec), J3X 1S2 (Canada)
Publication Date:
OSTI Identifier:
21596880
Resource Type:
Journal Article
Journal Name:
Physical Review. B, Condensed Matter and Materials Physics
Additional Journal Information:
Journal Volume: 84; Journal Issue: 9; Other Information: DOI: 10.1103/PhysRevB.84.094104; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1098-0121
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABLATION; ABSORPTION; CRYSTAL DEFECTS; DAMAGE; DIELECTRIC MATERIALS; ELECTRON DENSITY; INTERACTIONS; IONIZATION; MELTING; MULTI-PHOTON PROCESSES; NUMERICAL ANALYSIS; PULSES; SILICA; SIMULATION; SURFACES; TUNNEL EFFECT; CRYSTAL STRUCTURE; MATERIALS; MATHEMATICS; MINERALS; OXIDE MINERALS; PHASE TRANSFORMATIONS; SORPTION

Citation Formats

Chimier, B, Uteza, O, Sanner, N, Sentis, M, Itina, T, Lassonde, P, Legare, F, Vidal, F, and Kieffer, J C. Damage and ablation thresholds of fused-silica in femtosecond regime. United States: N. p., 2011. Web. doi:10.1103/PHYSREVB.84.094104.
Chimier, B, Uteza, O, Sanner, N, Sentis, M, Itina, T, Lassonde, P, Legare, F, Vidal, F, & Kieffer, J C. Damage and ablation thresholds of fused-silica in femtosecond regime. United States. https://doi.org/10.1103/PHYSREVB.84.094104
Chimier, B, Uteza, O, Sanner, N, Sentis, M, Itina, T, Lassonde, P, Legare, F, Vidal, F, and Kieffer, J C. Thu . "Damage and ablation thresholds of fused-silica in femtosecond regime". United States. https://doi.org/10.1103/PHYSREVB.84.094104.
@article{osti_21596880,
title = {Damage and ablation thresholds of fused-silica in femtosecond regime},
author = {Chimier, B and Uteza, O and Sanner, N and Sentis, M and Itina, T and Lassonde, P and Legare, F and Vidal, F and Kieffer, J C},
abstractNote = {We present an experimental and numerical study of the damage and ablation thresholds at the surface of a dielectric material, e.g., fused silica, using short pulses ranging from 7 to 300 fs. The relevant numerical criteria of damage and ablation thresholds are proposed consistently with experimental observations of the laser irradiated zone. These criteria are based on lattice thermal melting and electronic cohesion temperature, respectively. The importance of the three major absorption channels (multi-photon absorption, tunnel effect, and impact ionization) is investigated as a function of pulse duration (7-300 fs). Although the relative importance of the impact ionization process increases with the pulse duration, our results show that it plays a role even at short pulse duration (<50 fs). For few optical cycle pulses (7 fs), it is also shown that both damage and ablation fluence thresholds tend to coincide due to the sharp increase of the free electron density. This electron-driven ablation regime is of primary interest for thermal-free laser-matter interaction and therefore for the development of high quality micromachining processes.},
doi = {10.1103/PHYSREVB.84.094104},
url = {https://www.osti.gov/biblio/21596880}, journal = {Physical Review. B, Condensed Matter and Materials Physics},
issn = {1098-0121},
number = 9,
volume = 84,
place = {United States},
year = {2011},
month = {9}
}