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Title: Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering

Abstract

The compositional dependence of co-sputtered tungsten indium zinc oxide (WInZnO) film properties was first investigated by means of a combinatorial technique. Indium zinc oxide (IZO) and WO{sub 3} targets were used with different target power. W composition ratio [W/(In+Zn+W)] was varied between 3 and 30 at% and film thickness was reduced as the sample position moved toward WO{sub 3} target. Furthermore, the optical bandgap energy increased gradually, which might be affected by the reduction in film thickness. All the WInZnO films showed an amorphous phase regardless of the W/(In+Zn+W) ratio. As the W/(In+Zn+W) ratio in WInZnO films increased, the carrier concentration was restricted, causing the increase in electrical resistivity. W cations worked as oxygen binders in determining the electronic properties, resulting in suppressing the formation of oxygen vacancies. Consequentially, W metal cations were effectively incorporated into the WInZnO films as a suppressor against the oxygen vacancies and the carrier generation by employing the combinatorial technique. - Graphical abstract: The film thickness and the sheet resistance (R{sub s}) with respect to the sample position of WInZnO films, which is compositionally graded by rf power for each target, are exhibited. Highlights: > The compositional dependence of co-sputtered WInZnO film properties is firstmore » investigated. > W cations work as oxygen binders in determining the electronic properties. > All the WInZnO films show an amorphous phase regardless of the W/(In+Zn+W) ratio. > W metal cations are effectively incorporated into the WInZnO films by the combinatorial technique.« less

Authors:
;  [1];  [1];  [2];  [3];  [4]; ;  [1];  [1]
  1. National Center for Nanoprocess and Equipments, Korea Institute of Industrial Technology (KITECH), 110-9 Oryong-dong, Buk-gu, Gwangju 500-480 (Korea, Republic of)
  2. (Korea, Republic of)
  3. Department of Physics, Chonnam National University, 300 Yongbong-dong, Buk-gu, Gwangju 500-757 (Korea, Republic of)
  4. Department of Electronic Engineering, Chosun University, 375 Seoseok-dong, Dong-gu, Gwangju 501-759 (Korea, Republic of)
Publication Date:
OSTI Identifier:
21580254
Resource Type:
Journal Article
Journal Name:
Journal of Solid State Chemistry
Additional Journal Information:
Journal Volume: 184; Journal Issue: 9; Other Information: DOI: 10.1016/j.jssc.2011.07.024; PII: S0022-4596(11)00402-6; Copyright (c) 2011 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Journal ID: ISSN 0022-4596
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; AMORPHOUS STATE; CATIONS; ELECTRIC CONDUCTIVITY; FILMS; INDIUM; LAYERS; MAGNETRONS; OXYGEN; SPUTTERING; THICKNESS; TUNGSTATES; TUNGSTEN; TUNGSTEN OXIDES; ZINC OXIDES; CHALCOGENIDES; CHARGED PARTICLES; DIMENSIONS; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; IONS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; REFRACTORY METAL COMPOUNDS; REFRACTORY METALS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TUNGSTEN COMPOUNDS; ZINC COMPOUNDS

Citation Formats

Oh, Byeong-Yun, Park, Jae-Cheol, Lee, Young-Jun, Department of Electronic Engineering, Chosun University, 375 Seoseok-dong, Dong-gu, Gwangju 501-759, Cha, Sang-Jun, Kim, Joo-Hyung, Kim, Kwang-Young, Kim, Tae-Won, and Heo, Gi-Seok, E-mail: gsheo@kitech.re.kr. Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering. United States: N. p., 2011. Web. doi:10.1016/j.jssc.2011.07.024.
Oh, Byeong-Yun, Park, Jae-Cheol, Lee, Young-Jun, Department of Electronic Engineering, Chosun University, 375 Seoseok-dong, Dong-gu, Gwangju 501-759, Cha, Sang-Jun, Kim, Joo-Hyung, Kim, Kwang-Young, Kim, Tae-Won, & Heo, Gi-Seok, E-mail: gsheo@kitech.re.kr. Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering. United States. doi:10.1016/j.jssc.2011.07.024.
Oh, Byeong-Yun, Park, Jae-Cheol, Lee, Young-Jun, Department of Electronic Engineering, Chosun University, 375 Seoseok-dong, Dong-gu, Gwangju 501-759, Cha, Sang-Jun, Kim, Joo-Hyung, Kim, Kwang-Young, Kim, Tae-Won, and Heo, Gi-Seok, E-mail: gsheo@kitech.re.kr. Thu . "Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering". United States. doi:10.1016/j.jssc.2011.07.024.
@article{osti_21580254,
title = {Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering},
author = {Oh, Byeong-Yun and Park, Jae-Cheol and Lee, Young-Jun and Department of Electronic Engineering, Chosun University, 375 Seoseok-dong, Dong-gu, Gwangju 501-759 and Cha, Sang-Jun and Kim, Joo-Hyung and Kim, Kwang-Young and Kim, Tae-Won and Heo, Gi-Seok, E-mail: gsheo@kitech.re.kr},
abstractNote = {The compositional dependence of co-sputtered tungsten indium zinc oxide (WInZnO) film properties was first investigated by means of a combinatorial technique. Indium zinc oxide (IZO) and WO{sub 3} targets were used with different target power. W composition ratio [W/(In+Zn+W)] was varied between 3 and 30 at% and film thickness was reduced as the sample position moved toward WO{sub 3} target. Furthermore, the optical bandgap energy increased gradually, which might be affected by the reduction in film thickness. All the WInZnO films showed an amorphous phase regardless of the W/(In+Zn+W) ratio. As the W/(In+Zn+W) ratio in WInZnO films increased, the carrier concentration was restricted, causing the increase in electrical resistivity. W cations worked as oxygen binders in determining the electronic properties, resulting in suppressing the formation of oxygen vacancies. Consequentially, W metal cations were effectively incorporated into the WInZnO films as a suppressor against the oxygen vacancies and the carrier generation by employing the combinatorial technique. - Graphical abstract: The film thickness and the sheet resistance (R{sub s}) with respect to the sample position of WInZnO films, which is compositionally graded by rf power for each target, are exhibited. Highlights: > The compositional dependence of co-sputtered WInZnO film properties is first investigated. > W cations work as oxygen binders in determining the electronic properties. > All the WInZnO films show an amorphous phase regardless of the W/(In+Zn+W) ratio. > W metal cations are effectively incorporated into the WInZnO films by the combinatorial technique.},
doi = {10.1016/j.jssc.2011.07.024},
journal = {Journal of Solid State Chemistry},
issn = {0022-4596},
number = 9,
volume = 184,
place = {United States},
year = {2011},
month = {9}
}