Residual stress-dependent electric conductivity of sputtered co-doped CeO{sub 2} thin-film electrolyte
- State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084 (China)
Sm{sup 3+} and Nd{sup 3+} co-doped ceria thin-film electrolytes have been deposited on polycrystalline alumina substrates via RF magnetron sputtering. Electric conductivity is evaluated with respect to the residual stress in the film by sin{sup 2} {psi}-methodology, indicating that an in-plane tensile stress is applied to the as-deposited film. The stress in the film increases as annealing temperature decreases, and there is an enlarged crystal lattice. The results also reveal that the annealed film with a greater stress shows a higher electric conductivity, which might be due to the lower activation energy. The conductivity of the film annealed at 600 deg. C is as high as 0.009 S cm{sup -1} at 500 deg. C, and the residual stress is determined to be 542.70 MPa at room temperature.
- OSTI ID:
- 21560185
- Journal Information:
- Journal of Applied Physics, Vol. 109, Issue 8; Other Information: DOI: 10.1063/1.3573669; (c) 2011 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACTIVATION ENERGY
ALUMINIUM OXIDES
ANNEALING
CERIUM OXIDES
CRYSTAL LATTICES
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
NEODYMIUM ADDITIONS
NEODYMIUM IONS
POLYCRYSTALS
PRESSURE RANGE MEGA PA 100-1000
RESIDUAL STRESSES
SAMARIUM ADDITIONS
SAMARIUM IONS
SPUTTERING
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
TEMPERATURE RANGE 0400-1000 K
THIN FILMS
ALLOYS
ALUMINIUM COMPOUNDS
CERIUM COMPOUNDS
CHALCOGENIDES
CHARGED PARTICLES
CRYSTAL STRUCTURE
CRYSTALS
ELECTRICAL PROPERTIES
ENERGY
FILMS
HEAT TREATMENTS
IONS
MATERIALS
NEODYMIUM ALLOYS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PRESSURE RANGE
PRESSURE RANGE MEGA PA
RARE EARTH ADDITIONS
RARE EARTH ALLOYS
RARE EARTH COMPOUNDS
SAMARIUM ALLOYS
STRESSES
TEMPERATURE RANGE