Angular and energy distribution of Sn ion debris ejected from a laser-produced plasma source, for laser power densities in the range suitable for extreme ultraviolet lithography

Journal Article · Fri Apr 01 00:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3558988· OSTI ID:21538209

O'Connor, A; Morris, O; Sokell, E ^[1]

---

1. School of Physics, University College Dublin, Dublin (Ireland)

In this paper, experimental results are presented for the spatial and energy distributions of charge-discriminated Sn ions ejected from laser-produced plasmas. The plasmas were formed on solid, planar Sn targets, irradiated with a Nd:YAG laser. Ions were investigated using a calibrated electrostatic sector analyzer, scanning an energy-to-charge ratio range of 0.22 to 2.2 keV/e for emission angles between 20 and 80 degrees relative to target normal. Results were obtained for three laser power densities, in the region suitable for inducing significant extreme ultraviolet emission, of the order 1.5-8.1 x 10{sup 11} W/cm{sup 2}. The fully differentiated data were found to be well characterized by Gaussian fits, which allowed trends in the emission profiles to be readily quantified. Ions of set energy and charge were observed to possess a preferential angle of emission, the superposition of which yields a physical basis for the total angular emission observed previously and in this work. The experimental results obtained have been related to physical processes within the plasma that influence the energy and angle of ejection of ions from laser produced plasmas.

• OSTI ID: 21538209
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 7; Other Information: DOI: 10.1063/1.3558988; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOY-MO99
EMISSION
ENERGY SPECTRA
EXTREME ULTRAVIOLET RADIATION
ION SOURCES
LASER-PRODUCED PLASMA
MINUS-PLUS RATIO
NEODYMIUM LASERS
PLASMA PRODUCTION
POWER DENSITY
SIMULATION
SOLIDS
TIN
TIN IONS
ALLOYS
CHARGED PARTICLES
CORROSION RESISTANT ALLOYS
DIMENSIONLESS NUMBERS
ELECTROMAGNETIC RADIATION
ELEMENTS
HEAT RESISTANT MATERIALS
HEAT RESISTING ALLOYS
IONS
LASERS
MATERIALS
METALS
MOLYBDENUM ALLOYS
MOLYBDENUM BASE ALLOYS
PLASMA
RADIATIONS
SOLID STATE LASERS
SPECTRA
TITANIUM ADDITIONS
TITANIUM ALLOYS
TRANSITION ELEMENT ALLOYS
ULTRAVIOLET RADIATION
ZIRCONIUM ADDITIONS
ZIRCONIUM ALLOYS