Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source

Journal Article · Mon May 16 00:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3589359· OSTI ID:21518438

Yuspeh, S; Tao, Y; Burdt, R A; Tillack, M S; Ueno, Y; Najmabadi, F ^[1]

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1. Department of Electrical and Computer Engineering and Center for Energy Research, University of California-San Diego, 9500 Gilman Drive, La Jolla, California 92093-0438 (United States)

The effect of laser focal spot diameters of 26 and 150 {mu}m on 13.5 nm extreme ultraviolet (EUV) radiation is investigated. Simulations show that the smaller spot size has a shorter electron plasma density scale length and deeper and denser laser energy deposition region. This results in additional time required for plasma expansion and radiation transport to efficiently emit EUV light. This is experimentally observed as an increase in the delay between the EUV emission and the laser pulse. The shorter scale length plasma reabsorbs less EUV light, resulting in a higher conversion efficiency, smaller and slightly brighter light source.

• OSTI ID: 21518438
• Journal Information: Applied Physics Letters, Vol. 98, Issue 20; Other Information: DOI: 10.1063/1.3589359; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BRIGHTNESS
CONVERSION
EFFICIENCY
ELECTRONS
EMISSION
EXTREME ULTRAVIOLET RADIATION
LASER RADIATION
LIGHT SOURCES
LIGHT TRANSMISSION
PLASMA
PLASMA DENSITY
PLASMA EXPANSION
PLASMA SIMULATION
PULSES
RADIATION TRANSPORT
TIN
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
EXPANSION
FERMIONS
LEPTONS
METALS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
RADIATION SOURCES
RADIATIONS
SIMULATION
TRANSMISSION
ULTRAVIOLET RADIATION