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Title: Acoustic plate mode propagation and interaction with ultraviolet light in periodic AIN-on-sapphire structure

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3557507· OSTI ID:21518305
;  [1];  [1]; ; ;  [2]
  1. Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180 (United States)
  2. Sensor Electronic Technology, Inc., Columbia, South Carolina 29209 (United States)

AlN overlay featuring periodic columnar structure fabricated by epitaxial lateral overgrowth technique leads to excitation of acoustic plate modes (APMs) not observed in overlays without such periodic structure. The measured velocities of acoustic plate modes propagating in AlN-on-sapphire structure were verified by numerical simulation. The APM velocity is strongly modulated by UV illumination at wavelengths from 240 to 365 nm, and the corresponding phase response is sensitive to both the UV power and the wavelength with maximum sensitivity of 3.0 ppm/({mu}W/cm{sup 2}) at 240 nm.

OSTI ID:
21518305
Journal Information:
Applied Physics Letters, Vol. 98, Issue 9; Other Information: DOI: 10.1063/1.3557507; (c) 2011 American Institute of Physics; ISSN 0003-6951
Country of Publication:
United States
Language:
English