Structural and electrical characteristics of high quality (100) orientated-Zn{sub 3}N{sub 2} thin films grown by radio-frequency magnetron sputtering

Journal Article · Fri Oct 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3493208· OSTI ID:21476560

Xing, G Z ^[1]; Wang, D D; Yao, B; Yang, T; He, Q ^[1]; Yang, J H; Yang, L L ^[2]

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1. State Key Laboratory of Superhard Materials and Department of Physics, Jilin University, Changchun 130023 (China)
2. Institute of Condensed Matter Physics, Jilin Normal University, Siping 136000 (China)

We report on highly crystalline zinc nitride (Zn{sub 3}N{sub 2}) thin films which were grown by rf magnetron sputtering on quartz substrates. The substrate temperature during growth is found to strongly affect the crystal quality of the thin films. The chemical bonding states were determined by x-ray photoelectron spectroscopy. Large chemical shifts in core-level N 1s peaks with binding energy of 396.4 eV were observed as compared to N 1s of free amine (398.8 eV), indicating Zn-N bond formation. Two N 1s states were found: one is N{sub 1} formed by Zn-N bonds and another is (N{sub 2}) produced by substitution of N molecules at N ion sites, which leads to larger lattice constants, consistent with x-ray diffraction results. Temperature-dependent Hall effect measurements of our Zn{sub 3}N{sub 2} films exhibited distinct conduction mechanisms at specific different temperature ranges.

• OSTI ID: 21476560
• Journal Information: Journal of Applied Physics, Vol. 108, Issue 8; Other Information: DOI: 10.1063/1.3493208; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BINDING ENERGY
CHEMICAL BONDS
CHEMICAL SHIFT
CRYSTAL GROWTH
CRYSTALS
DEPOSITION
EV RANGE
HALL EFFECT
LATTICE PARAMETERS
NITROGEN IONS
QUARTZ
RADIOWAVE RADIATION
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
TEMPERATURE DEPENDENCE
THIN FILMS
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
ZINC NITRIDES
CHARGED PARTICLES
COHERENT SCATTERING
DIFFRACTION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ENERGY
ENERGY RANGE
FILMS
IONS
MATERIALS
MINERALS
NITRIDES
NITROGEN COMPOUNDS
OXIDE MINERALS
PHOTOELECTRON SPECTROSCOPY
PNICTIDES
RADIATIONS
SCATTERING
SPECTROSCOPY
ZINC COMPOUNDS