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Title: Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy

Abstract

Optical emisssion spectroscopy was employed to study a high pressure (100 s of Torr), slot-type (600 {mu}m interelectrode gap), argon dc microdischarge, with added traces of nitrogen. Spatially resolved gas temperature profiles were obtained by analyzing rovibrational bands of the N{sub 2} first positive system. The gas temperature peaked near the cathode and increased with current. The contribution of Stark broadening to the hydrogen H{sub {beta}} emission lineshape was used to extract the electron density. The axial distribution of electron density as well as visual observation revealed that the microdischarge positive column was highly constricted. The electron density near the sheath edge increased with both pressure and current.

Authors:
; ; ;  [1];  [2]
  1. Department of Chemical and Biomolecular Engineering, Plasma Processing Laboratory, University of Houston, Houston, Texas 77204-4004 (United States)
  2. Laboratoire de Spectrometrie Physique (UMR C5588), Universite J. Fourier de Grenoble and CNRS, BP 87, F38402, Saint Martin d'Heres Cedex (France)
Publication Date:
OSTI Identifier:
21476378
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 107; Journal Issue: 5; Other Information: DOI: 10.1063/1.3318498; (c) 2010 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; BOUNDARY LAYERS; CATHODES; ELECTRIC DISCHARGES; ELECTRON DENSITY; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; HYDROGEN; ION TEMPERATURE; LINE BROADENING; NITROGEN; PLASMA; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA PRESSURE; PLASMA SHEATH; POSITIVE COLUMN; STARK EFFECT; ELECTRODES; ELEMENTS; FLUIDS; GASES; LAYERS; NONMETALS; RARE GASES; SPECTROSCOPY

Citation Formats

Belostotskiy, Sergey G, Ouk, Tola, Donnelly, Vincent M, Economou, Demetre J, and Sadeghi, Nader. Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy. United States: N. p., 2010. Web. doi:10.1063/1.3318498.
Belostotskiy, Sergey G, Ouk, Tola, Donnelly, Vincent M, Economou, Demetre J, & Sadeghi, Nader. Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy. United States. doi:10.1063/1.3318498.
Belostotskiy, Sergey G, Ouk, Tola, Donnelly, Vincent M, Economou, Demetre J, and Sadeghi, Nader. Mon . "Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy". United States. doi:10.1063/1.3318498.
@article{osti_21476378,
title = {Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy},
author = {Belostotskiy, Sergey G and Ouk, Tola and Donnelly, Vincent M and Economou, Demetre J and Sadeghi, Nader},
abstractNote = {Optical emisssion spectroscopy was employed to study a high pressure (100 s of Torr), slot-type (600 {mu}m interelectrode gap), argon dc microdischarge, with added traces of nitrogen. Spatially resolved gas temperature profiles were obtained by analyzing rovibrational bands of the N{sub 2} first positive system. The gas temperature peaked near the cathode and increased with current. The contribution of Stark broadening to the hydrogen H{sub {beta}} emission lineshape was used to extract the electron density. The axial distribution of electron density as well as visual observation revealed that the microdischarge positive column was highly constricted. The electron density near the sheath edge increased with both pressure and current.},
doi = {10.1063/1.3318498},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 5,
volume = 107,
place = {United States},
year = {2010},
month = {3}
}