Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magnetic anisotropy field of Ru/FeCoB film

Journal Article · Sat May 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3350899· OSTI ID:21476203

Hirata, Ken-ichiro; Gomi, Shunsuke; Mashiko, Yasuhiro; Nakagawa, Shigeki ^[1]

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1. Department of Physical Electronics, Tokyo Institute of Technology, O-okayama 2-12-1, Meguro-ku, Tokyo 152-8552 (Japan)

Although boron-free FeCo films prepared on a Ru underlayer exhibits isotropic in-plane magnetic property, boron added FeCoB films prepared on Ru underlayer revealed large in-plane magnetic anisotropy with a high anisotropy field of 500 Oe. The effect of boron addition on the in-plane anisotropic residual stress in FeCoB film was investigated using sin{sup 2} {psi} method of x-ray diffraction analysis. Large isotropic compressive stress was observed in Ru/FeCo film. In contrast, anisotropic in-plane residual stress was observed in Ru/FeCoB film. The compressive stress along the easy axis of Ru/FeCoB film is released more than that along the hard axis. Such anisotropic residual stress is regarded as an origin of the in-plane magnetic anisotropy through inverse magnetostriction effect. Owing to the configuration of the facing targets sputtering system, boron atoms are sputtered and deposited anisotropically, and so they penetrate FeCo crystals and release the compressive stress along the incidence direction.

• OSTI ID: 21476203
• Journal Information: Journal of Applied Physics, Vol. 107, Issue 9; Conference: 11. joint MMM-Intermag conference, Washington, DC (United States), 18-22 Jan 2010; Other Information: DOI: 10.1063/1.3350899; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANISOTROPY
BORON ADDITIONS
COBALT ALLOYS
CRYSTALS
DEPOSITION
FERROMAGNETIC MATERIALS
IRON ALLOYS
LAYERS
MAGNETIZATION
MAGNETOSTRICTION
RESIDUAL STRESSES
RUTHENIUM
SPUTTERING
THIN FILMS
X-RAY DIFFRACTION
ALLOYS
BORON ALLOYS
COHERENT SCATTERING
DIFFRACTION
ELEMENTS
FILMS
MAGNETIC MATERIALS
MAGNETIC PROPERTIES
MATERIALS
METALS
PHYSICAL PROPERTIES
PLATINUM METALS
REFRACTORY METALS
SCATTERING
STRESSES
TRANSITION ELEMENT ALLOYS
TRANSITION ELEMENTS