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Title: Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source

Abstract

We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. Plasma sputtering vaporizes the target's material forming nanoclusters by inert gas condensation. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the sputtering discharge power, inert gas flow rate, and aggregation length have been investigated. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions. The experimental nanocluster sizes are compared with a theoretical model that reveals the growth of large nanoclusters from 'embryos' by a two-body collision. The model is valid for a specific range of deposition parameters (low inert gas flow rates and aggregation lengths equal or below 70 mm).

Authors:
; ; ; ;  [1]
  1. Department of Physics, United Arab Emirates University, Al Ain, P.O. Box 17551 (United Arab Emirates)
Publication Date:
OSTI Identifier:
21476132
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 107; Journal Issue: 3; Other Information: DOI: 10.1063/1.3296131; (c) 2010 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; AGGLOMERATION; DEPOSITION; FABRICATION; GAS FLOW; NANOSTRUCTURES; OPTIMIZATION; PALLADIUM; PLASMA; SOLID CLUSTERS; SPUTTERING; ELEMENTS; FLUID FLOW; METALS; PLATINUM METALS; TRANSITION ELEMENTS

Citation Formats

Ayesh, A I, Qamhieh, N, Ghamlouche, H, Thaker, S, and El-Shaer, M. Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source. United States: N. p., 2010. Web. doi:10.1063/1.3296131.
Ayesh, A I, Qamhieh, N, Ghamlouche, H, Thaker, S, & El-Shaer, M. Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source. United States. doi:10.1063/1.3296131.
Ayesh, A I, Qamhieh, N, Ghamlouche, H, Thaker, S, and El-Shaer, M. Mon . "Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source". United States. doi:10.1063/1.3296131.
@article{osti_21476132,
title = {Fabrication of size-selected Pd nanoclusters using a magnetron plasma sputtering source},
author = {Ayesh, A I and Qamhieh, N and Ghamlouche, H and Thaker, S and El-Shaer, M},
abstractNote = {We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. Plasma sputtering vaporizes the target's material forming nanoclusters by inert gas condensation. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the sputtering discharge power, inert gas flow rate, and aggregation length have been investigated. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions. The experimental nanocluster sizes are compared with a theoretical model that reveals the growth of large nanoclusters from 'embryos' by a two-body collision. The model is valid for a specific range of deposition parameters (low inert gas flow rates and aggregation lengths equal or below 70 mm).},
doi = {10.1063/1.3296131},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 3,
volume = 107,
place = {United States},
year = {2010},
month = {2}
}