Characteristics of the magnetron discharge plasma at large distances from the cathode

Journal Article · Wed Dec 15 00:00:00 EST 2010 · Plasma Physics Reports

DOI:https://doi.org/10.1134/S1063780X10130210· OSTI ID:21443321

Pashentsev, V N ^[1]

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1. Moscow Engineering Physics Institute (Russian Federation)

The parameters of the magnetron plasma at distances several times larger than the cathode diameter were measured. The plasma temperature and density measured by the probe technique were found to be 1.4 eV and 6 x 10{sup 10} cm{sup -3}, respectively. The dependences of the plasma density and temperature on the argon flow rate in the course of TiAlN coating deposition were determined. Before deposition of the coating, the substrate was cleaned by ion sputtering at substrate bias voltages higher than 200 V.

• OSTI ID: 21443321
• Journal Information: Plasma Physics Reports, Vol. 36, Issue 13; Other Information: DOI: 10.1134/S1063780X10130210; Copyright (c) 2010 Pleiades Publishing, Ltd.; ISSN 1063-780X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CATHODES
DEPOSITION
ELECTRON TEMPERATURE
FLOW RATE
ION TEMPERATURE
MAGNETRONS
PLASMA
PLASMA DENSITY
SPUTTERING
SUBSTRATES
ELECTRODES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
RARE GASES