Surface Slope Metrology on Deformable Soft X-ray Mirrors
- Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)
- Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)
We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.
- OSTI ID:
- 21431080
- Journal Information:
- AIP Conference Proceedings, Vol. 1234, Issue 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463330; (c) 2010 American Institute of Physics; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Surface Slope Metrology on Deformable Soft X-ray Mirrors
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADVANCED LIGHT SOURCE
CONFIGURATION
DESIGN
IMAGES
INTERFEROMETRY
MIRRORS
REFINING
SHAPE
SIMULATION
SOFT X RADIATION
SURFACES
WAVELENGTHS
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
PROCESSING
RADIATION SOURCES
RADIATIONS
STORAGE RINGS
SYNCHROTRON RADIATION SOURCES
X RADIATION