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Title: Surface Slope Metrology on Deformable Soft X-ray Mirrors

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.3463330· OSTI ID:21431080
; ; ; ; ; ;  [1];  [2]
  1. Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)
  2. Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720 (United States)

We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

OSTI ID:
21431080
Journal Information:
AIP Conference Proceedings, Vol. 1234, Issue 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463330; (c) 2010 American Institute of Physics; ISSN 0094-243X
Country of Publication:
United States
Language:
English