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Title: Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors

Abstract

To form a magnified hard X-ray image with a 50 nm resolution, we have studied total reflection mirror optics with two pairs of elliptical and hyperbolic mirrors, which is called 'Advanced Kirkpatrick-Baez system'. A designed optical system has 200x and 300x magnifications in vertical and horizontal directions. Also diffraction limit size in the optical system is 40 nmx45 nm. We fabricated a pair of elliptical and hyperbolic mirrors for horizontal imaging with a figure accuracy of 2 nm using elastic emission machining (EEM), microstitching interferometry (MSI) and relative-angle-determinable stitching interferometry (RADSI). One-dimensional tests for forming a demagnified image of a slit were carried out at an X-ray energy of 11.5 keV at BL29XUL (EH2) of SPring-8. As a result, a shape beam with a FWHM of 78 nm was observed. This demonstrates that we realized one-dimensional Wolter optics that has a spatial resolution of 78 nm.

Authors:
; ; ; ; ;  [1]; ; ; ;  [2];  [1]
  1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. SPring-8/RIKEN, 1-1-1 Kouto, Sayoucho, Sayogun, Hyogo 679-5148 (Japan)
Publication Date:
OSTI Identifier:
21413458
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1234; Journal Issue: 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463187; (c) 2010 American Institute of Physics; Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACCURACY; BEAMS; DIFFRACTION; EMISSION; HARD X RADIATION; INTERFEROMETRY; KEV RANGE 10-100; MICROSCOPES; ONE-DIMENSIONAL CALCULATIONS; OPTICAL SYSTEMS; REFLECTION; SPATIAL RESOLUTION; SPRING-8 STORAGE RING; COHERENT SCATTERING; ELECTROMAGNETIC RADIATION; ENERGY RANGE; IONIZING RADIATIONS; KEV RANGE; RADIATION SOURCES; RADIATIONS; RESOLUTION; SCATTERING; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; X RADIATION

Citation Formats

Matsuyama, S, Fujii, M, Wakioka, T, Mimura, H, Handa, S, Kimura, T, Nishino, Y, Tamasaku, K, Makina, Y, Ishikawa, T, Yamauchi, K, and Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors. United States: N. p., 2010. Web. doi:10.1063/1.3463187.
Matsuyama, S, Fujii, M, Wakioka, T, Mimura, H, Handa, S, Kimura, T, Nishino, Y, Tamasaku, K, Makina, Y, Ishikawa, T, Yamauchi, K, & Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors. United States. https://doi.org/10.1063/1.3463187
Matsuyama, S, Fujii, M, Wakioka, T, Mimura, H, Handa, S, Kimura, T, Nishino, Y, Tamasaku, K, Makina, Y, Ishikawa, T, Yamauchi, K, and Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Wed . "Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors". United States. https://doi.org/10.1063/1.3463187.
@article{osti_21413458,
title = {Development of Hard X-ray Imaging Optics with Two Pairs of Elliptical and Hyperbolic Mirrors},
author = {Matsuyama, S and Fujii, M and Wakioka, T and Mimura, H and Handa, S and Kimura, T and Nishino, Y and Tamasaku, K and Makina, Y and Ishikawa, T and Yamauchi, K and Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871},
abstractNote = {To form a magnified hard X-ray image with a 50 nm resolution, we have studied total reflection mirror optics with two pairs of elliptical and hyperbolic mirrors, which is called 'Advanced Kirkpatrick-Baez system'. A designed optical system has 200x and 300x magnifications in vertical and horizontal directions. Also diffraction limit size in the optical system is 40 nmx45 nm. We fabricated a pair of elliptical and hyperbolic mirrors for horizontal imaging with a figure accuracy of 2 nm using elastic emission machining (EEM), microstitching interferometry (MSI) and relative-angle-determinable stitching interferometry (RADSI). One-dimensional tests for forming a demagnified image of a slit were carried out at an X-ray energy of 11.5 keV at BL29XUL (EH2) of SPring-8. As a result, a shape beam with a FWHM of 78 nm was observed. This demonstrates that we realized one-dimensional Wolter optics that has a spatial resolution of 78 nm.},
doi = {10.1063/1.3463187},
url = {https://www.osti.gov/biblio/21413458}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1234,
place = {United States},
year = {2010},
month = {6}
}