Machine Protection System for the Stepper Motor Actuated SyLMAND Mirrors

Journal Article · Wed Jun 23 00:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3463323· OSTI ID:21410332

Subramanian, V R; Dolton, W; Wells, G; Hallin, E ^[1]; Achenbach, S ^[2]; Klymyshyn, D M ^[2]; Augustin, M ^[3]

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1. Canadian Light Source, 101 Perimeter Road, Saskatoon, SK S7N 0X4 (Canada)
2. Department of Electrical and Computer Engineering, University of Saskatchewan, 57 Campus Dr., Saskatoon, SK S7N 5A9 (Canada)
3. Karlsruhe Institute of Technology, Postfach 3640, D-76021 Karlsruhe (Germany)

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, consists of a dedicated X-ray lithography beamline on a bend magnet port, and process support laboratories in a clean room environment. The beamline includes a double mirror system with flat, chromium-coated silicon mirrors operated at varying grazing angles of incidence (4 mrad to 45 mrad) for spectral adjustment by high energy cut-off. Each mirror can be independently moved by two stepper motors to precisely control the pitch and vertical position. We present in this paper the machine protection system implemented in the double mirror system to allow for safe operation of the two mirrors and to avoid consequences of potential stepper motor malfunction.

• OSTI ID: 21410332
• Journal Information: AIP Conference Proceedings, Vol. 1234, Issue 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463323; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DATA ACQUISITION
LIGHT SOURCES
MAGNETS
MIRRORS
OPTICS
POTENTIALS
SAFETY
SILICON
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
X RADIATION
ACCELERATORS
CYCLIC ACCELERATORS
ELECTROMAGNETIC RADIATION
ELEMENTS
EQUIPMENT
IONIZING RADIATIONS
RADIATION SOURCES
RADIATIONS
SEMIMETALS