Strongly enhanced incorporation of oxygen into barium titanate based multilayer ceramic capacitors using water vapor

Journal Article · Mon Jul 12 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3460156· OSTI ID:21367010

Kessel, M; De Souza, R A; Martin, M ^[1]; Yoo, H -I ^[2]

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1. Institute of Physical Chemistry, RWTH Aachen University, 52056 Aachen (Germany)
2. Department of Materials Science and Engineering, Seoul National University, Seoul 151-742 (Korea, Republic of)

The reoxidation of sintered BaTiO{sub 3}-based multilayer ceramic capacitors (MLCCs) is currently an empirically determined, but poorly understood, procedure. In this work, the incorporation of oxygen into BaTiO{sub 3}-based MLCCs has been studied by means of isotope exchange annealing ({sup 18}O{sub 2}/{sup 16}O{sub 2}, {sup 1}H{sub 2}{sup 18}O/{sup 1}H{sub 2}{sup 16}O or {sup 2}H{sub 2}{sup 16}O/{sup 1}H{sub 2}{sup 16}O) and subsequent determination of the isotope profiles in the solid by secondary ion mass spectrometry. Oxygen isotope profiles in the barium titanate dielectric can be described by a bulk diffusion coefficient D* and a surface exchange coefficient k*. The values obtained for k* indicate that oxygen incorporation from H{sub 2}O is much faster than from dry O{sub 2}; it thus plays the key role in the reoxidation process.

• OSTI ID: 21367010
• Journal Information: Applied Physics Letters, Vol. 97, Issue 2; Other Information: DOI: 10.1063/1.3460156; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
BARIUM COMPOUNDS
CAPACITORS
CERAMICS
DIELECTRIC MATERIALS
DIFFUSION
ISOTOPIC EXCHANGE
LAYERS
MASS SPECTRA
MASS SPECTROSCOPY
OXIDATION
OXYGEN
OXYGEN ISOTOPES
TITANATES
WATER
WATER VAPOR
ALKALINE EARTH METAL COMPOUNDS
CHEMICAL REACTIONS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
HEAT TREATMENTS
HYDROGEN COMPOUNDS
ISOTOPES
MATERIALS
NONMETALS
OXYGEN COMPOUNDS
SPECTRA
SPECTROSCOPY
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
VAPORS