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Title: Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture

Abstract

Coherent hard x-ray imaging of nonisolated weak phase objects is demonstrated by confining x-ray beam in a region of a few micrometers in cross section using a micrometer-sized aperture. Two major obstacles in the hard x-ray coherent diffraction imaging, isolating samples and obtaining central speckles, are addressed by using the aperture. The usefulness of the proposed method is illustrated by reconstructing the exit wave field of a nanoscale trench structure fabricated on silicon which serves as a weak phase object. The quantitative phase information of the exit wave field was used to reconstruct the depth profile of the trench structure. The scanning capability of this method was also briefly discussed.

Authors:
; ; ; ; ; ; ; ;  [1]
  1. Department of Materials Science and Engineering and Nanobio Materials and Electronics, Graduate Program of Photonics and Applied Physics, Gwangju Institute of Science and Technology, Gwangju 500-712 (Korea, Republic of)
Publication Date:
OSTI Identifier:
21366737
Resource Type:
Journal Article
Journal Name:
Physical Review. B, Condensed Matter and Materials Physics
Additional Journal Information:
Journal Volume: 81; Journal Issue: 16; Other Information: DOI: 10.1103/PhysRevB.81.165437; (c) 2010 The American Physical Society; Journal ID: ISSN 1098-0121
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; APERTURES; CROSS SECTIONS; DIFFRACTION; HARD X RADIATION; IMAGES; NANOSTRUCTURES; SILICON; COHERENT SCATTERING; ELECTROMAGNETIC RADIATION; ELEMENTS; IONIZING RADIATIONS; OPENINGS; RADIATIONS; SCATTERING; SEMIMETALS; X RADIATION

Citation Formats

Kim, Sunam, Kim, Chan, Lee, Suyong, Marathe, Shashidhara, Noh, D Y, Kang, H C, Kim, S S, Sandy, A, Narayanan, S, Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University, Gwangju 501-759, and Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439. Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture. United States: N. p., 2010. Web. doi:10.1103/PHYSREVB.81.165437.
Kim, Sunam, Kim, Chan, Lee, Suyong, Marathe, Shashidhara, Noh, D Y, Kang, H C, Kim, S S, Sandy, A, Narayanan, S, Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University, Gwangju 501-759, & Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439. Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture. United States. https://doi.org/10.1103/PHYSREVB.81.165437
Kim, Sunam, Kim, Chan, Lee, Suyong, Marathe, Shashidhara, Noh, D Y, Kang, H C, Kim, S S, Sandy, A, Narayanan, S, Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University, Gwangju 501-759, and Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439. 2010. "Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture". United States. https://doi.org/10.1103/PHYSREVB.81.165437.
@article{osti_21366737,
title = {Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture},
author = {Kim, Sunam and Kim, Chan and Lee, Suyong and Marathe, Shashidhara and Noh, D Y and Kang, H C and Kim, S S and Sandy, A and Narayanan, S and Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University, Gwangju 501-759 and Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439},
abstractNote = {Coherent hard x-ray imaging of nonisolated weak phase objects is demonstrated by confining x-ray beam in a region of a few micrometers in cross section using a micrometer-sized aperture. Two major obstacles in the hard x-ray coherent diffraction imaging, isolating samples and obtaining central speckles, are addressed by using the aperture. The usefulness of the proposed method is illustrated by reconstructing the exit wave field of a nanoscale trench structure fabricated on silicon which serves as a weak phase object. The quantitative phase information of the exit wave field was used to reconstruct the depth profile of the trench structure. The scanning capability of this method was also briefly discussed.},
doi = {10.1103/PHYSREVB.81.165437},
url = {https://www.osti.gov/biblio/21366737}, journal = {Physical Review. B, Condensed Matter and Materials Physics},
issn = {1098-0121},
number = 16,
volume = 81,
place = {United States},
year = {Thu Apr 15 00:00:00 EDT 2010},
month = {Thu Apr 15 00:00:00 EDT 2010}
}