skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

Abstract

Optical emission spectroscopy is applied to the study of a radiofrequency (13.56 MHz) discharge in methane used to obtain hydrogenated carbon films and particles. The methane dissociation allows the creation of species in the plasma bulk as H{sub 2}, H, and CH. The emission lines of these species are studied as a function of time and of incident rf power. The electron temperature is determined from the two line radiance ratio method and the corona balance model using the Balmer lines (H{sub alpha}, H{sub beta}, and H{sub gamma}). The incident rf power enhancement in the range 40-120 W leads to the increase in the emission line intensities as the electron temperature decreases. The temporal variations of CH and hydrogen emission lines, of the dc self-bias voltage, and of the electron temperature are correlated both with the particle behavior and growth in the plasma, and with the coating that grows onto the powered electrode.

Authors:
; ;  [1]
  1. Groupe de Recherches sur l'Energetique des Milieux Ionises (GREMI), UMR 6606 CNRS/Universite d'Orleans, Faculte des Sciences, Site de Bourges, rue Gaston Berger, BP 4043, 18028 Bourges Cedex (France)
Publication Date:
OSTI Identifier:
21359371
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 106; Journal Issue: 11; Other Information: DOI: 10.1063/1.3267292; (c) 2009 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; BALMER LINES; CARBON; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; HIGH-FREQUENCY DISCHARGES; HYDROGEN; ION TEMPERATURE; METHANE; MHZ RANGE 01-100; PLASMA; PLASMA DIAGNOSTICS; RADIOWAVE RADIATION; TIME DEPENDENCE; ALKANES; ELECTRIC DISCHARGES; ELECTROMAGNETIC RADIATION; ELEMENTS; FREQUENCY RANGE; HYDROCARBONS; MHZ RANGE; NONMETALS; ORGANIC COMPOUNDS; RADIATIONS; SPECTROSCOPY

Citation Formats

Massereau-Guilbaud, Veronique, Geraud-Grenier, Isabelle, and Plain, Andre. Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power. United States: N. p., 2009. Web. doi:10.1063/1.3267292.
Massereau-Guilbaud, Veronique, Geraud-Grenier, Isabelle, & Plain, Andre. Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power. United States. doi:10.1063/1.3267292.
Massereau-Guilbaud, Veronique, Geraud-Grenier, Isabelle, and Plain, Andre. Tue . "Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power". United States. doi:10.1063/1.3267292.
@article{osti_21359371,
title = {Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power},
author = {Massereau-Guilbaud, Veronique and Geraud-Grenier, Isabelle and Plain, Andre},
abstractNote = {Optical emission spectroscopy is applied to the study of a radiofrequency (13.56 MHz) discharge in methane used to obtain hydrogenated carbon films and particles. The methane dissociation allows the creation of species in the plasma bulk as H{sub 2}, H, and CH. The emission lines of these species are studied as a function of time and of incident rf power. The electron temperature is determined from the two line radiance ratio method and the corona balance model using the Balmer lines (H{sub alpha}, H{sub beta}, and H{sub gamma}). The incident rf power enhancement in the range 40-120 W leads to the increase in the emission line intensities as the electron temperature decreases. The temporal variations of CH and hydrogen emission lines, of the dc self-bias voltage, and of the electron temperature are correlated both with the particle behavior and growth in the plasma, and with the coating that grows onto the powered electrode.},
doi = {10.1063/1.3267292},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 11,
volume = 106,
place = {United States},
year = {2009},
month = {12}
}