A planar-type surface-wave plasma source with a subwavelength diffraction grating inclusion for large-area plasma applications

Journal Article · Wed Jul 01 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3168493· OSTI ID:21359276

Zhaoquan, Chen; Minghai, Liu; Liang, Tang; Peng, Hu; Xiwei, Hu ^[1]

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1. College of Electrical and Electronic Engineering, HuaZhong University of Science and Technology, WuHan, HuBei 430074 (China)

The electromagnetic wave through the subwavelength diffraction grating can be largely absorbed by surface-wave plasmas (SWPs). A SWP source is built with two slot-array antennas element. Due to the dissipation of surface waves in overdense plasmas, this source can provide remarkable discharge efficiency of 4.4 cm{sup 2}/W experimentally and 96% of incident power numerically. When the applied power as low as 200 W is supplied to the SWP source, a homogeneous plasma with the uniform area up to 14x36 cm{sup 2} and the plasma density up to 1.04x10{sup 18} m{sup -3} is generated under the quartz slab. By varying the incident power and gas pressure, the parameter of plasmas can be easily controlled without density jumping. Moreover, the characters of bi-Maxwellian electron energy distribution prove that our SWP source yield plasmas by surface heating actually. These excellent performances make the proposed source meet the requirements in large-area plasma processing and also give its advices for plasmas heating in next meter-size SWP sources.

• OSTI ID: 21359276
• Journal Information: Journal of Applied Physics, Vol. 106, Issue 1; Other Information: DOI: 10.1063/1.3168493; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANTENNAS
DIFFRACTION GRATINGS
ELECTROMAGNETIC RADIATION
ELECTRONS
ENERGY SPECTRA
HOMOGENEOUS PLASMA
PLASMA DENSITY
PLASMA HEATING
PLASMA SURFACE WAVES
PLASMONS
POLARONS
QUARTZ
WAVE PROPAGATION
ELECTRICAL EQUIPMENT
ELEMENTARY PARTICLES
EQUIPMENT
FERMIONS
HEATING
LEPTONS
MINERALS
OXIDE MINERALS
PLASMA
PLASMA WAVES
QUASI PARTICLES
RADIATIONS
SPECTRA