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Title: Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection

Abstract

We developed a computer-aided defect inspection system based on computed tomography (CT). The system consists of a homemade small cone-beam CT (CBCT) system and a graphical toolbox, which is used to extract a computer-aided design (CAD) model from the CT data. In the small CBCT system, the x-ray imaging detector is based on a complementary metal-oxide-semiconductor photodiode array in conjunction with a scintillator. Imaging performance of the detector was evaluated in terms of modulation-transfer function, noise-power spectrum, and detective quantum efficiency. The tomographic imaging performance of the small CBCT system was evaluated in terms of signal-to-noise ratio and contrast-to-noise ratio. The graphical toolbox to support defect inspection incorporates various functional tools such as volume rendering, segmentation, triangular-mesh data generation, and data reduction. All the tools have been integrated in a graphical-user interface form. The developed system can provide rapid visual inspection as well as quantitative evaluation of defects by comparing the extracted CAD file with the original file, if available, of an object. The performance of the developed system is demonstrated with experimental CT volume data.

Authors:
; ; ; ; ;  [1]; ;  [2]; ;  [3];  [4]
  1. School of Mechanical Engineering, Pusan National University, Jangjeon-dong, Geumjeong-gu, Busan 609-735 (Korea, Republic of)
  2. Sensor Business Division, E-WOO Technology Co., Ltd., Bora-dong, Giheung, Gyeonggi-do 449-904 (Korea, Republic of)
  3. School of Dentistry, Pusan National University, Ami-dong, Seo-gu, Busan 602-739 (Korea, Republic of)
  4. Rad-icon Imaging Corp., Belick Street, Santa Clara, CA 95054-2404 (United States)
Publication Date:
OSTI Identifier:
21357554
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 105; Journal Issue: 9; Other Information: DOI: 10.1063/1.3124360; (c) 2009 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; COMPUTER-AIDED DESIGN; COMPUTERIZED TOMOGRAPHY; CURIUM OXIDES; METALS; PHOTODIODES; QUANTUM EFFICIENCY; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR MATERIALS; SIGNAL-TO-NOISE RATIO; TRANSFER FUNCTIONS; X-RAY DETECTION; ACTINIDE COMPOUNDS; CHALCOGENIDES; CURIUM COMPOUNDS; DESIGN; DETECTION; DIAGNOSTIC TECHNIQUES; DIMENSIONLESS NUMBERS; EFFICIENCY; ELEMENTS; FUNCTIONS; MATERIALS; MEASURING INSTRUMENTS; OXIDES; OXYGEN COMPOUNDS; RADIATION DETECTION; RADIATION DETECTORS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES; TOMOGRAPHY; TRANSPLUTONIUM COMPOUNDS; TRANSURANIUM COMPOUNDS

Citation Formats

Kim, Ho Kyung, Yun, Seungman, Han, Jong Chul, Youn, Hanbean, Cho, Min Kook, Lim, Chang Hwy, Heo, Sung Kyn, Shon, Cheol-Soon, Kim, Seong-Sik, Cho, Bong Hae, and Achterkirchen, Thorsten Graeve. Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection. United States: N. p., 2009. Web. doi:10.1063/1.3124360.
Kim, Ho Kyung, Yun, Seungman, Han, Jong Chul, Youn, Hanbean, Cho, Min Kook, Lim, Chang Hwy, Heo, Sung Kyn, Shon, Cheol-Soon, Kim, Seong-Sik, Cho, Bong Hae, & Achterkirchen, Thorsten Graeve. Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection. United States. https://doi.org/10.1063/1.3124360
Kim, Ho Kyung, Yun, Seungman, Han, Jong Chul, Youn, Hanbean, Cho, Min Kook, Lim, Chang Hwy, Heo, Sung Kyn, Shon, Cheol-Soon, Kim, Seong-Sik, Cho, Bong Hae, and Achterkirchen, Thorsten Graeve. 2009. "Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection". United States. https://doi.org/10.1063/1.3124360.
@article{osti_21357554,
title = {Performance characterization of microtomography with complementary metal-oxide-semiconductor detectors for computer-aided defect inspection},
author = {Kim, Ho Kyung and Yun, Seungman and Han, Jong Chul and Youn, Hanbean and Cho, Min Kook and Lim, Chang Hwy and Heo, Sung Kyn and Shon, Cheol-Soon and Kim, Seong-Sik and Cho, Bong Hae and Achterkirchen, Thorsten Graeve},
abstractNote = {We developed a computer-aided defect inspection system based on computed tomography (CT). The system consists of a homemade small cone-beam CT (CBCT) system and a graphical toolbox, which is used to extract a computer-aided design (CAD) model from the CT data. In the small CBCT system, the x-ray imaging detector is based on a complementary metal-oxide-semiconductor photodiode array in conjunction with a scintillator. Imaging performance of the detector was evaluated in terms of modulation-transfer function, noise-power spectrum, and detective quantum efficiency. The tomographic imaging performance of the small CBCT system was evaluated in terms of signal-to-noise ratio and contrast-to-noise ratio. The graphical toolbox to support defect inspection incorporates various functional tools such as volume rendering, segmentation, triangular-mesh data generation, and data reduction. All the tools have been integrated in a graphical-user interface form. The developed system can provide rapid visual inspection as well as quantitative evaluation of defects by comparing the extracted CAD file with the original file, if available, of an object. The performance of the developed system is demonstrated with experimental CT volume data.},
doi = {10.1063/1.3124360},
url = {https://www.osti.gov/biblio/21357554}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 9,
volume = 105,
place = {United States},
year = {2009},
month = {5}
}