Direct growth of transparent conducting Nb-doped anatase TiO{sub 2} polycrystalline films on glass

Journal Article · Mon Jun 15 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3148267· OSTI ID:21352259

Yamada, Naoomi; Kasai, Junpei ^[1]; Hitosugi, Taro ^[1]; Hoang, Ngoc Lam Huong; Nakao, Shoichiro; Hirose, Yasushi; Shimada, Toshihiro; Hasegawa, Tetsuya ^[1]

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1. Kanagawa Academy of Science and Technology (KAST), Kanagawa 213-0012 (Japan)

This paper proposes a novel sputter-based method for the direct growth of transparent conducting Ti{sub 1-x}Nb{sub x}O{sub 2} (TNO) polycrystalline films on glass, without the need for any postdeposition treatments, by the use of an initial seed-layer. Anatase TNO epitaxial films grown on LaAlO{sub 3} (100) substrates under a reducing atmosphere exhibited a low resistivity (rho) of (3-6)x10{sup -4} OMEGA cm. On glass, however, highly resistive rutile phase polycrystalline films (rhoapprox100 OMEGA cm) formed preferentially under the same conditions. These results suggest that epitaxial stabilization of the oxygen-deficient anatase phase occurs on lattice-matched substrates. To produce a similar effect on a glass surface, we deposited a seed-layer of anatase TNO with excellent crystallinity under an increased oxygen atmosphere. As a result, anatase phase TNO polycrystalline films could be grown even under heavily reducing atmospheres. An optimized film exhibited rho=1.1x10{sup -3} OMEGA cm and optical absorption lower than 10% in the visible region. This rho value is more than one order of magnitude lower than values reported for directly deposited TNO polycrystalline films. This indicates that the seed-layer method has considerable potential for producing transparent conducting TNO polycrystalline films on glass.

• OSTI ID: 21352259
• Journal Information: Journal of Applied Physics, Vol. 105, Issue 12; Other Information: DOI: 10.1063/1.3148267; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
ALUMINATES
CRYSTAL GROWTH
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
EPITAXY
GLASS
LANTHANUM COMPOUNDS
LAYERS
NIOBIUM
OXYGEN
POLYCRYSTALS
RUTILE
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
THIN FILMS
TITANIUM OXIDES
ALUMINIUM COMPOUNDS
CHALCOGENIDES
CRYSTAL GROWTH METHODS
CRYSTALS
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
MATERIALS
METALS
MINERALS
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIOACTIVE MATERIALS
RADIOACTIVE MINERALS
RARE EARTH COMPOUNDS
REFRACTORY METALS
SORPTION
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS