skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Cubic Sc{sub 1-x}Al{sub x}N solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

Abstract

Reactive magnetron sputter epitaxy was used to deposit thin solid films of Sc{sub 1-x}Al{sub x}N (0<=x<=1) onto MgO(111) substrates with ScN(111) seed layers. Stoichiometric films were deposited from elemental Sc and Al targets at substrate temperatures of 600 deg. C. The films were analyzed by Rutherford backscattering spectroscopy, elastic recoil detection analysis, x-ray diffraction, and transmission electron microscopy. Results show that rocksalt structure (c)-Sc{sub 1-x}Al{sub x}N solid solutions with AlN molar fractions up to approx60% can be synthesized. For higher AlN contents, the system phase separates into c- and wurtzite structure (w)-Sc{sub 1-x}Al{sub x}N domains. The w-domains are present in three different orientations relative to the seed layer, namely, Sc{sub 1-x}Al{sub x}N(0001)||ScN(111) with Sc{sub 1-x}Al{sub x}N[1210]||ScN[110], Sc{sub 1-x}Al{sub x}N(1011)||ScN(111) with Sc{sub 1-x}Al{sub x}N[1210]||ScN[110], and Sc{sub 1-x}Al{sub x}N(1011)||ScN(113). The results are compared to first-principles density functional theory calculations for the mixing enthalpies of c-, w-, and zinc blende Sc{sub 0.50}Al{sub 0.50}N solid solutions, yielding metastability with respect to phase separation for all temperatures below the melting points of AlN and ScN.

Authors:
; ; ;  [1];  [2];  [3]
  1. Department of Physics, Chemistry and Biology (IFM), Thin Film Physics Division, Linkoeping University, S-581 83 Linkoeping (Sweden)
  2. Department of Physics, Chemistry and Biology (IFM), Theory and Modeling Division, Linkoeping University, S-581 83 Linkoeping (Sweden)
  3. Research Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, P.O. Box 49, H-1525 Budapest (Hungary)
Publication Date:
OSTI Identifier:
21352226
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 105; Journal Issue: 11; Other Information: DOI: 10.1063/1.3132862; (c) 2009 American Institute of Physics; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM NITRIDES; CRYSTAL STRUCTURE; DENSITY FUNCTIONAL METHOD; EPITAXY; LAYERS; MAGNESIUM OXIDES; MAGNETRONS; MELTING POINTS; MIXING HEAT; PIEZOELECTRICITY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANDIUM NITRIDES; SOLID SOLUTIONS; SPUTTERING; STOICHIOMETRY; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; ZINC SULFIDES; ALKALINE EARTH METAL COMPOUNDS; ALUMINIUM COMPOUNDS; CALCULATION METHODS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DIFFRACTION; DISPERSIONS; ELECTRICITY; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ENTHALPY; EQUIPMENT; FILMS; HOMOGENEOUS MIXTURES; INORGANIC PHOSPHORS; MAGNESIUM COMPOUNDS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MIXTURES; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHOSPHORS; PHYSICAL PROPERTIES; PNICTIDES; SCANDIUM COMPOUNDS; SCATTERING; SOLUTIONS; SPECTROSCOPY; SULFIDES; SULFUR COMPOUNDS; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION TEMPERATURE; VARIATIONAL METHODS; ZINC COMPOUNDS

Citation Formats

Hoeglund, Carina, Bareno, Javier, Birch, Jens, Hultman, Lars, Alling, Bjoern, and Czigany, Zsolt. Cubic Sc{sub 1-x}Al{sub x}N solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111). United States: N. p., 2009. Web. doi:10.1063/1.3132862.
Hoeglund, Carina, Bareno, Javier, Birch, Jens, Hultman, Lars, Alling, Bjoern, & Czigany, Zsolt. Cubic Sc{sub 1-x}Al{sub x}N solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111). United States. doi:10.1063/1.3132862.
Hoeglund, Carina, Bareno, Javier, Birch, Jens, Hultman, Lars, Alling, Bjoern, and Czigany, Zsolt. Mon . "Cubic Sc{sub 1-x}Al{sub x}N solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)". United States. doi:10.1063/1.3132862.
@article{osti_21352226,
title = {Cubic Sc{sub 1-x}Al{sub x}N solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)},
author = {Hoeglund, Carina and Bareno, Javier and Birch, Jens and Hultman, Lars and Alling, Bjoern and Czigany, Zsolt},
abstractNote = {Reactive magnetron sputter epitaxy was used to deposit thin solid films of Sc{sub 1-x}Al{sub x}N (0<=x<=1) onto MgO(111) substrates with ScN(111) seed layers. Stoichiometric films were deposited from elemental Sc and Al targets at substrate temperatures of 600 deg. C. The films were analyzed by Rutherford backscattering spectroscopy, elastic recoil detection analysis, x-ray diffraction, and transmission electron microscopy. Results show that rocksalt structure (c)-Sc{sub 1-x}Al{sub x}N solid solutions with AlN molar fractions up to approx60% can be synthesized. For higher AlN contents, the system phase separates into c- and wurtzite structure (w)-Sc{sub 1-x}Al{sub x}N domains. The w-domains are present in three different orientations relative to the seed layer, namely, Sc{sub 1-x}Al{sub x}N(0001)||ScN(111) with Sc{sub 1-x}Al{sub x}N[1210]||ScN[110], Sc{sub 1-x}Al{sub x}N(1011)||ScN(111) with Sc{sub 1-x}Al{sub x}N[1210]||ScN[110], and Sc{sub 1-x}Al{sub x}N(1011)||ScN(113). The results are compared to first-principles density functional theory calculations for the mixing enthalpies of c-, w-, and zinc blende Sc{sub 0.50}Al{sub 0.50}N solid solutions, yielding metastability with respect to phase separation for all temperatures below the melting points of AlN and ScN.},
doi = {10.1063/1.3132862},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 11,
volume = 105,
place = {United States},
year = {2009},
month = {6}
}