Gas convection caused by electron pressure drop in the afterglow of a pulsed inductively coupled plasma discharge

Journal Article · Mon Mar 29 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3368124· OSTI ID:21347341

Cunge, G; Vempaire, D; Sadeghi, N ^[1]

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1. Laboratoire des Technologies de la Microelectronique, CEA-LETI, CNRS, 17 rue des Martyrs, 38054 Grenoble Cedex 9 (France)

Neutral depletion is an important phenomenon in high-density plasmas. We show that in pulsed discharges, the neutral depletion caused by the electron pressure P{sub e} plays an important role on radical transport. In the afterglow, P{sub e} drops rapidly by electron cooling. So, a neutral pressure gradient built up between the plasma bulk and the reactor walls, which forces the cold surrounding gas to move rapidly toward the reactor center. Measured drift velocity of Al atoms in the early afterglow of Cl{sub 2}/Ar discharge by time-resolved laser induced fluorescence is as high as 250 ms{sup -1}. This is accompanied by a rapid gas cooling.

• OSTI ID: 21347341
• Journal Information: Applied Physics Letters, Vol. 96, Issue 13; Other Information: DOI: 10.1063/1.3368124; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AFTERGLOW
ALUMINIUM
ARGON
CHLORINE
CONVECTION
ELECTRIC DISCHARGES
ELECTRON COOLING
ELECTRONS
FLUORESCENCE
GAS COOLING
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA PRESSURE
PRESSURE DROP
PRESSURE GRADIENTS
TIME RESOLUTION
WALL EFFECTS
BEAM COOLING
COOLING
ELEMENTARY PARTICLES
ELEMENTS
EMISSION
ENERGY TRANSFER
FERMIONS
FLUIDS
GASES
HALOGENS
HEAT TRANSFER
LEPTONS
LUMINESCENCE
MASS TRANSFER
METALS
NONMETALS
PHOTON EMISSION
RARE GASES
RESOLUTION
TIMING PROPERTIES