Simulation and Experimental Study of a 13.56 MHz Planar Coil, Inductively Coupled Plasma Reactor

Journal Article · Fri Jul 10 00:00:00 EDT 2009 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3192290· OSTI ID:21344276

Jayapalan, K K; Chin, O H ^[1]

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1. Plasma Research Laboratory, Physics Department, Faculty of Science, University of Malaya, 50603 Kuala Lumpur (Malaysia)

Hysteresis in a 13.56 MHz planar coil, inductively coupled plasma (ICP) reactor is modeled using the methods prescribed in El-Fayoumiet al. and Turneret al. The stable working points of the reactor are identified by determining the intersections between simulated absorbed electron power and electron loss power curves. From the plots, transition currents between stable working points are identified and compared with experimentally measured values. Study of hysteresis in ICPs provides better understanding of ICP formation which would be useful for reactor pressure and current optimization.

• OSTI ID: 21344276
• Journal Information: AIP Conference Proceedings, Vol. 1150, Issue 1; Conference: 3. international meeting on frontiers in physics, Kuala Lumpur (Malaysia), 12-16 Jan 2009; Other Information: DOI: 10.1063/1.3192290; (c) 2009 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC CURRENTS
ELECTRON LOSS
ELECTRONS
ETCHING
HYSTERESIS
MHZ RANGE
OPTIMIZATION
PLASMA
PLASMA DIAGNOSTICS
PLASMA PRESSURE
PLASMA SIMULATION
THERMODYNAMICS
CURRENTS
ELEMENTARY PARTICLES
FERMIONS
FREQUENCY RANGE
LEPTONS
SIMULATION
SURFACE FINISHING