Development of Extreme Ultraviolet Radiation Source using Laser Triggered Vacuum Spark Discharge Plasma
Journal Article
·
· AIP Conference Proceedings
- Department of Energy Sciences, Tokyo Institute of Technology, Nagatsuta 4259, Midori-ku, Yokohama 226-8502 (Japan)
A laser triggerd discharge produced Sn plasma light source has been developed. Experimental parameters such as electrode separation and laser irradiation power are varied to optimize EUV emission power. It is clear that the maximum EUV radiation was occurred in the position where the pinch was observed.
- OSTI ID:
- 21255336
- Journal Information:
- AIP Conference Proceedings, Vol. 1088, Issue 1; Conference: 7. international conference on dense Z-pinches, Alexandria, VA (United States), 12-21 Aug 2008; Other Information: DOI: 10.1063/1.3079726; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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