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Title: Spectroscopic modeling and interpretation of industrial plasmas in materials processing

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.56577· OSTI ID:21202606
; ; ; ;  [1]; ;  [2]; ;  [3]
  1. Plasma Physics Division, Naval Research Laboratory, Washington, District of Columbia (United States)
  2. Chemistry Division, Naval Research Laboratory, Washington, District of Columbia (United States)
  3. Jet Propulsion Laboratory, Pasadena, California (United States)

No abstract prepared.

OSTI ID:
21202606
Journal Information:
AIP Conference Proceedings, Vol. 443, Issue 1; Conference: International conference on atomic processes in plasmas, Auburn, AL (United States), 23-26 Mar 1998; Other Information: DOI: 10.1063/1.56577; (c) 1998 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English