Application of scanning probe microscopy nano-indentation towards nanomechanical characterization of polymer films
- Mail Drop 254, Motorola Inc., 2200 W. Broadway Rd., Mesa, Arizona 85202 (United States)
The extremely high measurement sensitivity and accuracy has made scanning probe microscopy (SPM) a valuable tool for detecting various kinds of tip surface interactions such as Van der Waals force for AFM, electron tunneling for STM, electric/magnetic forces for EFM/MFM, frictional force for LFM, etc. This paper presents a new technique, SPM nano-indentation technique, for monitoring the repulsive force between the sharp probe and material surface as a means to detect the mechanical properties of materials. The key advantages of SPM nano-indentation are its imaging capability which allows accurate measurement of indentation geometry and precise location of indentation probe for nanomechanical measurement. This particular study explores the areas of applicability of SPM for measuring mechanical properties such as Young's modulus of materials. Limit studies have been done in understanding the reproducibility of force curves, the effect of surface roughness on force curve, substrate on Young's modulus measurement, etc. Examples of Young's modulus extraction for organic films will be presented.
- OSTI ID:
- 21202331
- Journal Information:
- AIP Conference Proceedings, Vol. 449, Issue 1; Conference: 1998 international conference on characterization and metrology for ULSI technology, Gaithersburg, MD (United States), 23-27 Mar 1998; Other Information: DOI: 10.1063/1.56860; (c) 1998 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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