Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe

Journal Article · Wed Apr 01 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3068037· OSTI ID:21190129

Hirata, Ken-ichiro; Hashimoto, Atsuto; Matsuu, Toshimitsu; Nakagawa, Shigeki ^[1]

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1. Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552 (Japan)

FeCoB layers prepared on Ru underlayer possess a high saturation magnetization M{sub s} and a high in-plane magnetic anisotropy filed H{sub k}. Effects of preparation conditions were investigated. Low Ar gas pressure condition and thicker film thickness were effective to attain distortion of FeCo crystallite. As the crystallinity of Ru underlayer became higher, higher H{sub k} was induced. The accumulation of anisotropic stress in the film caused by the oblique incidences of depositing atoms with high energy seems to be one of the important effects to attain high anisotropy field. It was succeeded to prepare the Ru/FeCoB film with high H{sub k} of 500 Oe.

• OSTI ID: 21190129
• Journal Information: Journal of Applied Physics, Vol. 105, Issue 7; Conference: 53. annual conference on magnetism and magnetic materials, Austin, TX (United States), 10-14 Nov 2008; Other Information: DOI: 10.1063/1.3068037; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANISOTROPY
BORON ALLOYS
COBALT ALLOYS
DEPOSITION
IRON ALLOYS
LAYERS
MAGNETIZATION
RUTHENIUM ALLOYS
SPUTTERING
TERNARY ALLOY SYSTEMS
THIN FILMS