skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices

Abstract

The cross-plane thermal conductivities of metal/semiconductor multilayers and epitaxial superlattices have been measured as a function of period by time-domain thermoreflectance at room temperature. (001)-oriented ZrN (metal)/ScN (semiconductor) multilayers and (Zr,W)N/ScN epitaxial superlattices with the rocksalt crystal structure were grown on (001)MgO substrates by reactive magnetron sputtering. A distinct minimum in thermal conductivity at a period of {approx}6 nm is observed for ZrN/ScN multilayers. The minimum thermal conductivity of 5.25 W/m K is a factor of {approx}2.7 smaller than the mean of the thermal conductivities (including only the lattice contributions) of the values measured for films of the constituent materials, and approximately equal to the lattice component of the thermal conductivity of a Zr{sub 0.65}Sc{sub 0.35}N alloy film ({approx}5 W/m K). Alloying the ZrN layers with WN{sub x} reduces the lattice mismatch, yielding epitaxial (Zr,W)N/ScN superlattices. The addition of WN{sub x} also reduces the thermal conductivity to {approx}2 W/m K, a value that is sufficiently low to suggest promise for these materials as solid-state thermionic generators.

Authors:
;  [1]; ;  [2]
  1. School of Materials Engineering, School of Electrical and Computer Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47906 (United States)
  2. Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois, Urbana-Champaign, Illinois 61801 (United States)
Publication Date:
OSTI Identifier:
21185995
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 105; Journal Issue: 2; Other Information: DOI: 10.1063/1.3065092; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTAL DEFECTS; EPITAXY; LAYERS; MAGNESIUM OXIDES; NITROGEN ADDITIONS; SCANDIUM ALLOYS; SCANDIUM NITRIDES; SEMICONDUCTOR MATERIALS; SPUTTERING; SUPERLATTICES; TEMPERATURE RANGE 0273-0400 K; THERMAL CONDUCTIVITY; THERMIONIC CONVERTERS; THIN FILMS; TUNGSTEN NITRIDES; ZIRCONIUM ALLOYS; ZIRCONIUM NITRIDES; NESDPS Office of Nuclear Energy Space and Defense Power Systems

Citation Formats

Rawat, Vijay, Sands, Timothy D, Koh, Yee Kan, and Cahill, David G. Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices. United States: N. p., 2009. Web. doi:10.1063/1.3065092.
Rawat, Vijay, Sands, Timothy D, Koh, Yee Kan, & Cahill, David G. Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices. United States. doi:10.1063/1.3065092.
Rawat, Vijay, Sands, Timothy D, Koh, Yee Kan, and Cahill, David G. Thu . "Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices". United States. doi:10.1063/1.3065092.
@article{osti_21185995,
title = {Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices},
author = {Rawat, Vijay and Sands, Timothy D and Koh, Yee Kan and Cahill, David G},
abstractNote = {The cross-plane thermal conductivities of metal/semiconductor multilayers and epitaxial superlattices have been measured as a function of period by time-domain thermoreflectance at room temperature. (001)-oriented ZrN (metal)/ScN (semiconductor) multilayers and (Zr,W)N/ScN epitaxial superlattices with the rocksalt crystal structure were grown on (001)MgO substrates by reactive magnetron sputtering. A distinct minimum in thermal conductivity at a period of {approx}6 nm is observed for ZrN/ScN multilayers. The minimum thermal conductivity of 5.25 W/m K is a factor of {approx}2.7 smaller than the mean of the thermal conductivities (including only the lattice contributions) of the values measured for films of the constituent materials, and approximately equal to the lattice component of the thermal conductivity of a Zr{sub 0.65}Sc{sub 0.35}N alloy film ({approx}5 W/m K). Alloying the ZrN layers with WN{sub x} reduces the lattice mismatch, yielding epitaxial (Zr,W)N/ScN superlattices. The addition of WN{sub x} also reduces the thermal conductivity to {approx}2 W/m K, a value that is sufficiently low to suggest promise for these materials as solid-state thermionic generators.},
doi = {10.1063/1.3065092},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 2,
volume = 105,
place = {United States},
year = {2009},
month = {1}
}