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Title: Strong violet and green-yellow electroluminescence from silicon nitride thin films multiply implanted with Si ions

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3068002· OSTI ID:21175923
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  1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
  2. Institute of Materials Research and Engineering, Singapore 117602 (Singapore)
  3. Department of Physics, University of Hong Kong (Hong Kong)

Strong visible electroluminescence (EL) has been observed from a 30 nm silicon nitride thin film multiply implanted with Si ions and annealed at 1100 deg. C. The EL intensity shows a linear relationship with the current transport in the thin film at lower voltages, but a departure from the linear relationship with a quenching in the EL intensity is observed at higher voltages. The EL spectra show two primary EL bands including the predominant violet band at {approx}3.0 eV (415 nm) and the strong green-yellow band at {approx}2.2 eV (560 nm). Two weak bands including the ultraviolet band at {approx}3.8 eV and the near infrared band at {approx}1.45 eV emerge at high voltages. The evolution of each EL band with the voltage has been examined. The phenomena observed are explained, and the EL mechanisms are discussed.

OSTI ID:
21175923
Journal Information:
Applied Physics Letters, Vol. 94, Issue 4; Other Information: DOI: 10.1063/1.3068002; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English