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Title: Self-pulsing 10{sup 4} A cm{sup -2} current density discharges in dielectric barrier Al/Al{sub 2}O{sub 3} microplasma devices

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3064159· OSTI ID:21175849
;  [1]; ;  [2]; ; ; ;  [3]
  1. Department of Physics, Technion, Haifa 32000 (Israel)
  2. Department of Physics, Weizmann Institute of Science, Rehovot 76100 (Israel)
  3. Department of Electrical and Computer Engineering, University of Illinois, Urbana, Illinois, 61801 (United States)

Excitation of Al/Al{sub 2}O{sub 3} microplasma devices with 50 {mu}s, 800 V pulses produces, in Ar/H{sub 2} gas mixtures at 600 Torr, {approx}6 A current pulses with a duration of {approx}30 ns. Corresponding to peak current and power densities of {approx}10{sup 4} A/cm{sup 2} and {approx}2.5 GW/cm{sup 3}, respectively, these pulses are generated in a 10 {mu}s burst in which the voltage self-pulses at a repetition frequency of {approx}3 MHz. Analysis of the H{sub {alpha}}, H{sub {beta}}, and Ar II emission line profiles yields a plasma density of {approx}10{sup 17} cm{sup -3}, and the emission of O IV ions suggests the presence of energetic electrons. Images of the microplasma indicate that the plasma is initiated by surface flashover and extends {approx}200 {mu}m outside the microcavity.

OSTI ID:
21175849
Journal Information:
Applied Physics Letters, Vol. 94, Issue 1; Other Information: DOI: 10.1063/1.3064159; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English