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Title: Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source

Abstract

Plasma immersion ion implantation (PIII) into slender cylindrical bores with higher efficiency is described in this letter. The use of an inner end plasma source excited by a radio-frequency hollow cathode is investigated theoretically and experimentally. The end source that is covered by a small grounded shielding electrode to ensure steady discharge enables continuous delivery of the required plasmas, and the potential difference in the tube increases the ion impact energy. Particle-in-cell simulation demonstrates that the ion trajectories are complex due to the special electric field configuration that is composed of three regions characterized by ion acceleration, no electric field, and ion deceleration. The end source structure with the open shielding electrode is insufficient to achieve high ion energy, although it is effective in maintaining a steady discharge in the source. Hence, a shielding electrode with a protruding electrode structure is required to conduct high energy PIII; a cylindrical bore with an inner diameter of 20 mm is successfully implanted.

Authors:
; ; ; ;  [1]; ;  [2]
  1. State Key Laboratory of Advanced Welding Production and Technology, School of Materials Science and Engineering, Harbin Institute of Technology, 150001 Harbin (China)
  2. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon (Hong Kong)
Publication Date:
OSTI Identifier:
21175742
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 93; Journal Issue: 19; Other Information: DOI: 10.1063/1.2988192; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRIC FIELDS; HIGH-FREQUENCY DISCHARGES; HOLLOW CATHODES; ION IMPLANTATION; PLASMA; PLASMA SIMULATION; RADIOWAVE RADIATION; SHIELDING

Citation Formats

Xiubo, Tian, Chunzhi, Gong, Yongxian, Huang, Haifu, Jiang, Shiqin, Yang, Fu, Ricky K. Y., and Chu, Paul K. Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source. United States: N. p., 2008. Web. doi:10.1063/1.2988192.
Xiubo, Tian, Chunzhi, Gong, Yongxian, Huang, Haifu, Jiang, Shiqin, Yang, Fu, Ricky K. Y., & Chu, Paul K. Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source. United States. doi:10.1063/1.2988192.
Xiubo, Tian, Chunzhi, Gong, Yongxian, Huang, Haifu, Jiang, Shiqin, Yang, Fu, Ricky K. Y., and Chu, Paul K. Mon . "Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source". United States. doi:10.1063/1.2988192.
@article{osti_21175742,
title = {Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source},
author = {Xiubo, Tian and Chunzhi, Gong and Yongxian, Huang and Haifu, Jiang and Shiqin, Yang and Fu, Ricky K. Y. and Chu, Paul K},
abstractNote = {Plasma immersion ion implantation (PIII) into slender cylindrical bores with higher efficiency is described in this letter. The use of an inner end plasma source excited by a radio-frequency hollow cathode is investigated theoretically and experimentally. The end source that is covered by a small grounded shielding electrode to ensure steady discharge enables continuous delivery of the required plasmas, and the potential difference in the tube increases the ion impact energy. Particle-in-cell simulation demonstrates that the ion trajectories are complex due to the special electric field configuration that is composed of three regions characterized by ion acceleration, no electric field, and ion deceleration. The end source structure with the open shielding electrode is insufficient to achieve high ion energy, although it is effective in maintaining a steady discharge in the source. Hence, a shielding electrode with a protruding electrode structure is required to conduct high energy PIII; a cylindrical bore with an inner diameter of 20 mm is successfully implanted.},
doi = {10.1063/1.2988192},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 19,
volume = 93,
place = {United States},
year = {2008},
month = {11}
}