ECR plasma-assisted PVD deposition of {alpha}-Fe thin film on melt-spun Nd-Fe-B alloys

Journal Article · Wed Mar 19 00:00:00 EDT 2008 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2909161· OSTI ID:21136955

Fedorchenko, V D; Bovda, A M; Bovda, V A; Chebotarev, V V; Garkusha, I E; Medvedev, A V; Tereshin, V I ^[1]; Chen, C H; Liu, S ^[2]

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1. Institute of Plasma Physics, NSC Kharkov Institute of Physics and Technology, Akademicheskaya St. 1, 61108 Kharkov (Ukraine)
2. Magnetics Laboratory, University of Dayton, 300 College Park, Dayton, OH 45469 (United States)

The paper deals with plasma-assisted PVD of {alpha}-Fe thin film onto the melt-spun Nd-Fe-B-Co ribbons. The parameters of the plasma created by a planar rectangular ECR plasma source with a multipolar magnetic field and a double-slot antenna were as follows: electron density up to 1x10{sup 10} cm{sup -3}, electron temperature {approx}22 eV, the current density of ion flow to grounded disk-substrate was equal to {approx}0.5 mA/cm{sup 2} at the gas flow of 1 sccm, the microwave power was up to 300W. After degreasing and ultrasonic washing of Nd-Fe-B-Co ribbons, follow by ion etching, the deposition process was realized at a pulsed voltage bias of -1000 V with frequency 100 Hz, total current on the target 240 mA, current density 2.9 mA/cm{sup 2}. The deposition rate of 0.0083 {mu}m/min was achieved. The process continued for 2 hour. It was found that the magnetic melt-spun ribbons were homogeneously coated with the {alpha}-Fe film having a typical thickness of 1 {mu}m.

• OSTI ID: 21136955
• Journal Information: AIP Conference Proceedings, Vol. 993, Issue 1; Conference: PLASMA 2007: International conference on research and applications of plasmas; 4. German-Polish conference on plasma diagnostics for fusion and applications; 6. French-Polish seminar on thermal plasma in space and laboratory, Greifswald (Germany), 16-19 Oct 2007; Other Information: DOI: 10.1063/1.2909161; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BORON ALLOYS
CHEMICAL VAPOR DEPOSITION
CURRENT DENSITY
ELECTRIC POTENTIAL
ELECTRON CYCLOTRON-RESONANCE
ELECTRON DENSITY
ELECTRON TEMPERATURE
GAS FLOW
IRON ALLOYS
IRON-ALPHA
MAGNETIC FIELDS
MAGNETIC MATERIALS
NEODYMIUM ALLOYS
PHYSICAL VAPOR DEPOSITION
PLASMA
PLASMA PRODUCTION
RF SYSTEMS
THIN FILMS