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Title: Focusing mirror for x-ray free-electron lasers

Abstract

We present the design, fabrication, and evaluation of a large total-reflection mirror for focusing x-ray free-electron laser beams to nanometer dimensions. We used an elliptical focusing mirror made of silicon that was 400 mm long and had a focal length of 550 mm. Electrolytic in-process dressing grinding was used for initial-step figuring and elastic emission machining was employed for final figuring and surface smoothing. A figure accuracy with a peak-to-valley height of 2 nm was achieved across the entire area. Characterization of the focused beam was performed at BL29XUL of SPring-8. The focused beam size was 75 nm at 15 keV, which is almost equal to the theoretical size.

Authors:
; ; ;  [1]; ; ;  [2];  [3]; ;  [4]; ; ; ;  [5];  [1]
  1. Department of Precision Science and Technology, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198 (Japan)
  3. Faculty of Systems Science and Technology, Department of Machine Intelligence and Systems Engineering, Akita Prefectural University, 84-4 Tsuchiya-Ebinokuchi Yurihonjo, Akita 015-0055 (Japan)
  4. Japan Synchrotron Radiation Research Institute (JASRI)/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan)
  5. RIKEN/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan)
Publication Date:
OSTI Identifier:
21124105
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 79; Journal Issue: 8; Other Information: DOI: 10.1063/1.2964928; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; BEAMS; DESIGN; FABRICATION; FOCUSING; FREE ELECTRON LASERS; KEV RANGE 10-100; LASER MIRRORS; SEMICONDUCTOR MATERIALS; SILICON; SPRING-8 STORAGE RING; X RADIATION

Citation Formats

Mimura, Hidekazu, Kimura, Takashi, Yamakawa, Daisuke, Matsuyama, Satoshi, Morita, Shinya, Uehara, Yoshihiro, Ohmori, Hitoshi, Lin, Weimin, Yumoto, Hirokatsu, Ohashi, Haruhiko, Tamasaku, Kenji, Nishino, Yoshinori, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, and Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Focusing mirror for x-ray free-electron lasers. United States: N. p., 2008. Web. doi:10.1063/1.2964928.
Mimura, Hidekazu, Kimura, Takashi, Yamakawa, Daisuke, Matsuyama, Satoshi, Morita, Shinya, Uehara, Yoshihiro, Ohmori, Hitoshi, Lin, Weimin, Yumoto, Hirokatsu, Ohashi, Haruhiko, Tamasaku, Kenji, Nishino, Yoshinori, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, & Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Focusing mirror for x-ray free-electron lasers. United States. https://doi.org/10.1063/1.2964928
Mimura, Hidekazu, Kimura, Takashi, Yamakawa, Daisuke, Matsuyama, Satoshi, Morita, Shinya, Uehara, Yoshihiro, Ohmori, Hitoshi, Lin, Weimin, Yumoto, Hirokatsu, Ohashi, Haruhiko, Tamasaku, Kenji, Nishino, Yoshinori, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, and Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871. Fri . "Focusing mirror for x-ray free-electron lasers". United States. https://doi.org/10.1063/1.2964928.
@article{osti_21124105,
title = {Focusing mirror for x-ray free-electron lasers},
author = {Mimura, Hidekazu and Kimura, Takashi and Yamakawa, Daisuke and Matsuyama, Satoshi and Morita, Shinya and Uehara, Yoshihiro and Ohmori, Hitoshi and Lin, Weimin and Yumoto, Hirokatsu and Ohashi, Haruhiko and Tamasaku, Kenji and Nishino, Yoshinori and Yabashi, Makina and Ishikawa, Tetsuya and Yamauchi, Kazuto and Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871},
abstractNote = {We present the design, fabrication, and evaluation of a large total-reflection mirror for focusing x-ray free-electron laser beams to nanometer dimensions. We used an elliptical focusing mirror made of silicon that was 400 mm long and had a focal length of 550 mm. Electrolytic in-process dressing grinding was used for initial-step figuring and elastic emission machining was employed for final figuring and surface smoothing. A figure accuracy with a peak-to-valley height of 2 nm was achieved across the entire area. Characterization of the focused beam was performed at BL29XUL of SPring-8. The focused beam size was 75 nm at 15 keV, which is almost equal to the theoretical size.},
doi = {10.1063/1.2964928},
url = {https://www.osti.gov/biblio/21124105}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 8,
volume = 79,
place = {United States},
year = {2008},
month = {8}
}