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Title: In-depth resolution for LBIC technique by two-photon absorption

Abstract

A detailed study of the in-depth dependence of the laser-beam-induced current (LBIC) technique by sub-bandgap two-photon absorption (TPA) has been carried out in this paper. The strong focal dependence mechanism for TPA has been demonstrated by our studies through comparing the TPA technique with traditional single-photon-absorption-based ones. Dependence of the TPA-induced single-event transient response in linear integrated circuits on depth and position is investigated. Our results illustrate an interesting in-depth resolution for the TPA technique, which enables three-dimensional imaging of charge-collecting volumes through the backside of integrated circuits.

Authors:
; ; ; ; ;  [1]
  1. University Bordeaux 1, IXL, Microelectronics Lab. (France)
Publication Date:
OSTI Identifier:
21088094
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 41; Journal Issue: 4; Other Information: DOI: 10.1134/S106378260704001X; Copyright (c) 2007 Nauka/Interperiodica; Article Copyright (c) 2007 Pleiades Publishing, Ltd; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABSORPTION; BEAMS; DEPTH; INTEGRATED CIRCUITS; LASER RADIATION; PHOTONS

Citation Formats

Wan, D., Pouget, V., E-mail: pouget@ixl.fr, Douin, A., Jaulent, P., Lewis, D., and Fouillat, P. In-depth resolution for LBIC technique by two-photon absorption. United States: N. p., 2007. Web. doi:10.1134/S106378260704001X.
Wan, D., Pouget, V., E-mail: pouget@ixl.fr, Douin, A., Jaulent, P., Lewis, D., & Fouillat, P. In-depth resolution for LBIC technique by two-photon absorption. United States. doi:10.1134/S106378260704001X.
Wan, D., Pouget, V., E-mail: pouget@ixl.fr, Douin, A., Jaulent, P., Lewis, D., and Fouillat, P. Sun . "In-depth resolution for LBIC technique by two-photon absorption". United States. doi:10.1134/S106378260704001X.
@article{osti_21088094,
title = {In-depth resolution for LBIC technique by two-photon absorption},
author = {Wan, D. and Pouget, V., E-mail: pouget@ixl.fr and Douin, A. and Jaulent, P. and Lewis, D. and Fouillat, P.},
abstractNote = {A detailed study of the in-depth dependence of the laser-beam-induced current (LBIC) technique by sub-bandgap two-photon absorption (TPA) has been carried out in this paper. The strong focal dependence mechanism for TPA has been demonstrated by our studies through comparing the TPA technique with traditional single-photon-absorption-based ones. Dependence of the TPA-induced single-event transient response in linear integrated circuits on depth and position is investigated. Our results illustrate an interesting in-depth resolution for the TPA technique, which enables three-dimensional imaging of charge-collecting volumes through the backside of integrated circuits.},
doi = {10.1134/S106378260704001X},
journal = {Semiconductors},
number = 4,
volume = 41,
place = {United States},
year = {Sun Apr 15 00:00:00 EDT 2007},
month = {Sun Apr 15 00:00:00 EDT 2007}
}